VAT 26344-QA41-0002/0141 Series 26 HV Angle Valve 6-Inch Bellows Sealed

VAT 26344-QA41-0002/0141 Series 26 HV Angle Valve 6-Inch Bellows Sealed

The VAT 26344-QA41-0002/0141 is a Series 26 high vacuum (HV) angle valve with a 6-inch bore, designed for isolation and flow control in high vacuum pumping systems. It features a bellows seal construction to maintain vacuum integrity and is actuated by a pneumatic solenoid assembly. Manufactured in Switzerland by VAT, a leading maker of precision vacuum valves for industrial and scientific applications.

Specifications & What's Included

• Brand: VAT
• Model / Fabrication No.: 26344-QA41-0002/0141
• Series: Series 26
• Valve type: High vacuum (HV) angle valve
• Bore / port size: 6 inch
• Seal type: Bellows sealed
• Valve configuration: Angle (inline 90° flow path)
• Actuator type: Pneumatic
• Solenoid valve part number: N-7510-102 (visible on unit, brass body with yellow warning label)
• Body material: Stainless steel / aluminum alloy
• Country of manufacture: Switzerland
• Overall dimensions: 14" x 12" x 9"

Applications

VAT Series 26 angle valves are used as isolation valves in high vacuum pumping systems, where a reliable, low-outgassing seal is required. Common applications include semiconductor process equipment (CVD, PVD, plasma etch, and ion implant systems), research vacuum chambers, thin-film deposition systems, and other industrial or laboratory environments that operate in the high vacuum range (typically 10⁻³ to 10⁻⁷ mbar). The angle-body configuration allows the valve to be placed at a 90° junction in a vacuum line — commonly between a process chamber and the main pumping line or between a turbomolecular pump and a backing pump. Bellows-sealed designs like this one are preferred in high-vacuum work because the bellows isolates the actuation mechanism from the process environment, preventing virtual leaks and contamination. VAT has been producing precision vacuum valves for semiconductor fabs, national laboratories, and research institutions for decades, and the Series 26 remains a recognized standard in this class.