Varian 980-6100 Vacuum Process Control Automatic Valve Sequencer Rackmount 115V

Varian 980-6100 Vacuum Process Control Automatic Valve Sequencer Rackmount 115V

The Varian 980-6100 is a rackmount automatic valve sequencer designed to control and coordinate the valve, pump, and gauge functions of a vacuum sputtering or physical vapor deposition (PVD) system. Built by Varian's Vacuum Division, it provides both manual and automatic sequencing of the roughing pump, foreline valve, high-vacuum valve, system vent, and ion gauge, allowing an operator to safely pump down or vent a vacuum chamber through a defined interlock-protected sequence. The unit interfaces with a sputtering unit, external programmer, and system interlock circuits via multi-pin circular rear connectors.

Specifications & What's Included

• Manufacturer: Varian Vacuum Division
• Model: 980-6100
• Part Number: A627138
• Form Factor: Rackmount (rack ears installed)
• Input Power: 115VAC, 1A fuse (dual fuse holder on rear)
• Voltage Selector: 115V position (visible on rear panel)
• Front Panel Controls: Power On/Off, Foreline, Rough Pump (On), Hi Vac Pump (On), Rough Valve, Hi Vac, System Vent, Ion Gauge, Vent toggle switch, Pump LED indicator, ON control knob
• Sub-Panel Toggle Switches (drop-down access panel): Standby Lock, Pump Lock, Man/Auto, Rough Pump, Foreline or Rough Line Vent, Rough Valve, Hi Vac Valve, System Vent, Ion Gauge, Hi Vac Pump, Power Protect (Off/On)
• Roughing Mode Selection: Single / Separate (slide switch on rear panel)
• Rear Connectors: System Interlock (small circular), Hoist Interlock (small blue circular), Ion Gauge (large multi-pin circular), Programmer (large blue multi-pin circular), Sputtering Unit (two large blue multi-pin circular), System (large blue multi-pin circular), TC Gauge (multi-pin circular), IEC AC power inlet
• Interior: Main logic PCB with ICs, transistors, capacitors; relay board with approximately 12 relays; power transformer; full wiring harness — all appear complete and intact
• Country of Manufacture: USA
• Included: Unit only — no interconnect cables or mounting hardware included

Applications

The Varian 980-6100 was used with Varian's vacuum sputtering and PVD thin-film deposition systems, where it served as the central controller for the pump-down and venting sequences that protect the vacuum chamber and its components. In a typical sputtering system, achieving and maintaining high vacuum requires a carefully ordered sequence: the roughing pump brings the chamber to rough vacuum, the foreline valve is then managed, and the high-vacuum pump is brought online once the roughing stage is complete — all while interlocks protect against dangerous crossover events. The 980-6100 automates this sequencing, reducing operator error and allowing repeatable, safe pumpdown cycles. It connects to the sputtering unit, an external programmer, the ion gauge controller, and system interlock circuits, coordinating all subsystems from a single rackmount chassis. This type of vacuum process controller was a key component in research, semiconductor, and industrial thin-film deposition facilities using Varian sputtering systems from the 1970s through the 1990s. These controllers remain in demand for labs still operating legacy Varian vacuum equipment.