Description
Varian 323-0012 Cryocompressor 2.1 Helium Compressor Cryo Pump 208V 1-Phase
The Varian 323-0012 is a single-phase helium compressor from Varian's Cryocompressor 2.1 series, designed to supply high-pressure helium to closed-cycle cryogenic cryo pump systems used in high-vacuum applications. It compresses and circulates helium gas through an expander head mounted on a connected cryo pump, enabling the cryo pump to reach the cryogenic temperatures needed to condense and trap residual gases in a vacuum chamber. This unit is being sold AS-IS for parts or repair and will most likely require a helium recharge before it can be returned to service.
Specifications & What's Included
- Model: Varian 323-0012, Cryocompressor 2.1 series
- Input voltage (60 Hz): 208 VAC ±10%, 1-phase, 12–15A
- Input voltage (50 Hz): 200 VAC ±10%, 1-phase, 13–18A
- Power connector: 30A, 250V locking twist-lock plug (included)
- Refrigerant: High-pressure helium circuit
- Helium connections: Helium Supply and Helium Return quick-connect fittings (rear panel)
- Water cooling: Water Supply and Water Return fittings (rear panel)
- Minimum water supply pressure: 40 psig / 1,035 kPa
- Minimum water flow rate: 1 gpm / 3.8 L/min
- Supply water temperature range: 40°F–85°F / 4°C–29°C
- Front panel controls: Power On/Off switch, Remote/Local selector
- Front panel indicators: Helium Pressure, Water, Overtemp, Power status lights
- Supply Pressure gauge on front panel
- ENM elapsed-hours meter on front panel
- Adsorber service interval: every 13,500 operating hours
- Rear panel: Remote Start terminal, Status indicators, Remote/Local switch
- Expander connection: Slo-Blo fuse holder on rear panel
- Form factor: Freestanding, wheeled cabinet
- Overall dimensions: 19" W × 24" D × 21" H
- Manufacture: Made in USA
- Includes: Expander cable with multi-pin circular connector, 30A/250V locking power cord
Applications
Closed-cycle helium cryocompressors like the Varian 323-0012 are the power plant behind cryo pump systems in high-vacuum and ultra-high-vacuum environments. The compressor drives a Gifford-McMahon (GM) refrigeration cycle, supplying compressed helium to the expander head of the cryo pump, which cools internal arrays to temperatures as low as 10–20 K. At those temperatures, water vapor, nitrogen, oxygen, hydrocarbons, and most other residual gases freeze out and are effectively removed from the vacuum chamber — achieving base pressures in the 10⁻⁸ to 10⁻¹⁰ Torr range. Cryo pump systems of this type were widely used from the 1980s onward in semiconductor wafer processing (PVD sputtering, ion implantation, CVD), R&D surface science, electron beam and ion beam systems, and analytical instrumentation such as electron microscopes and mass spectrometers. The Cryocompressor 2.1 was a Varian standard platform for their line of cryo pump products and is compatible with Varian expander heads requiring a 2.1-series compressor interface. Periodic adsorber replacement (every ~13,500 hours) and helium recharging are routine maintenance operations for these systems.
This Varian 323-0012 Cryocompressor 2.1 helium compressor is being sold AS-IS for parts or repair. It is listed in as-is condition due to its age and will most likely need a helium recharge before it can be put back into service. The unit has not been tested or verified functional. Internal photos show the compressor assembly, adsorber, pressure vessel, and copper line network, all of which appear physically intact with no obvious catastrophic damage, though the actual operating condition is unknown. The cabinet shows cosmetic wear consistent with lab use. Due to its size and weight (~198 lbs), this item requires freight shipping. Please view our full photo set and contact us with any questions before purchasing.
Warranty Information
Additional Information
Brand: |
Varian |
Model: |
323-0012 |
MPN: |
323-0012 |
Type: |
Helium Cryocompressor |
SKU: |
44522 |
Seller Notes: |
Includes expander cable and power cord (30A, 250V locking plug) |
Series: |
Cryocompressor 2.1 |
Input Voltage: |
208 VAC ±10%, 1-Phase (60 Hz); 200 VAC ±10%, 1-Phase (50 Hz) |
Current Rating: |
12–15A at 60 Hz; 13–18A at 50 Hz |
Phase: |
Single Phase |
Frequency: |
50/60 Hz |
Power Connector: |
30A, 250V locking plug |
Water Supply Pressure: |
Min 40 psig / 1035 kPa |
Minimum Water Flow: |
1 gpm / 3.8 L/min |
Supply Water Temperature: |
40°F–85°F / 4°C–29°C |
Connections: |
Helium Supply, Helium Return, Water Supply, Water Return |
Control: |
Remote/Local switch; Remote Start; Status indicators |
Indicators: |
Helium Pressure, Water, Overtemp, Power |
Hours Meter: |
ENM hour meter on front panel |
Adsorber Service Interval: |
Every 13,500 hours |
Form Factor: |
Freestanding, wheeled cabinet |
Dimensions: |
19" W x 24" D x 21" H |
Country/Region of Manufacture: |
United States |
Application: |
Helium compressor for cryogenic high-vacuum cryo pumps |
Compatible With: |
Varian cryo pump systems requiring Cryocompressor 2.1 |
Refrigerant: |
Helium (high-pressure helium circuit) |
Condition Notes: |
Varian 323-0012 Cryocompressor 2.1 sold AS-IS for parts or repair. Likely needs helium recharge. Not tested or guaranteed functional. Freight shipping required (~198 lbs). Please view photos and contact us with questions. |
California Prop 65 Warning: |
WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov |
