Varian 1015230 19in Rackmount Cabinet VZC RF Waveguides 1007713-04 1007713-01

Varian 1015230 19in Rackmount Cabinet VZC RF Waveguides 1007713-04 1007713-01 Enclosure

The Varian 1015230 is a 19-inch floor-standing rackmount cabinet enclosure designated VZC, purpose-built to house RF and vacuum system modules used in semiconductor processing and related high-technology applications. The cabinet ships with two integrated RF waveguides and dedicated RF connection points, making it a ready-to-populate enclosure for Varian plasma, ion implant, or vacuum system builds. Four heavy-duty extra-duty sliders support rack-mounted modules of varying depth and mass.

Specifications & What's Included

• Manufacturer: Varian
• Part Number: 1015230
• Cabinet Designation: VZC
• Form Factor: 19-inch rackmount, floor-standing enclosure
• Overall Dimensions: 32" W x 24" D x 75" H
• Rack Rail Standard: 19-inch EIA
• Sliders: 4 x extra-duty / heavy-duty rack sliders
• Waveguide 1: Varian 1007713-04, 36-inch length (REV.Y, as labeled)
• Waveguide 2: Varian 1007713-01, 23-inch length (REV.B, as labeled)
• RF Connections: 2 (RF coaxial connectors visible on internal panel)
• AC Input: 50/60 Hz — voltage selectable (per interior power distribution label)
• Power Distribution: Internal AC input terminal/distribution block with DANGER HIGH VOLTAGE labeling; IEC-style power inlet
• Connectors: Mil-spec circular connectors (male and female) visible on waveguide shelf bracket
• Door: Glass or glazed front door with lock
• Internal cabling present

Applications

Varian is a long-established manufacturer of vacuum, semiconductor, and scientific instrumentation equipment. This type of rackmount enclosure with integrated RF waveguides was designed for use in semiconductor fabrication and research environments — particularly for systems where RF power needs to be routed from a generator to a process chamber via waveguide rather than coaxial cable. Waveguide-based RF delivery is common in plasma etch, CVD, and ion implant systems operating at high power levels where coaxial transmission losses become significant. The 19-inch format allows standard rack modules (RF generators, matching networks, vacuum controllers, and interface electronics) to be mounted directly in the same enclosure alongside the waveguide infrastructure. This cabinet would suit labs, fabs, or equipment integrators building or rebuilding Varian-based RF or vacuum process systems, or anyone needing a heavy-duty 19-inch enclosure with factory-integrated waveguide routing.