Telosense TGM Multi-Point Toxic Gas Monitor 16-Line Hydrides Semiconductor

Telosense TGM Multi-Point Toxic Gas Monitor 16-Line Hydrides Semiconductor

The Telosense TGM is a floor-standing multi-point toxic gas monitoring system designed to continuously sample and detect toxic hydrides and other hazardous semiconductor process gases across up to 16 independent sample lines. The system draws samples sequentially from each line through a manifold assembly, analyzes them for target gas concentrations, and triggers alarms when levels exceed set thresholds. It is housed in a large, lockable steel cabinet with a front-panel LCD numeric keypad/controller interface and a bank of status indicator lights.

Specifications & What's Included

• Manufacturer: Telosense
• Model: TGM (Toxic Gas Monitor)
• Configuration: Multi-point sequential sampling
• Number of monitoring lines: 16
• Target gases: Toxic hydrides (e.g. arsine, phosphine, diborane, silane) and other semiconductor process gases
• Front panel: LCD display, numeric keypad controller
• Status indicators: On-Line, Service Required, Alarm, No-Line LEDs
• Sample inlet manifold: Top-mounted panel with 16 red-capped tube fittings
• Manifold accessories: Pressure gauge, gas regulator/filter assembly, sample tubing
• Base: Integrated blower/pump unit at cabinet base
• Form factor: Floor-standing steel cabinet on pallet
• Dimensions: 24" W x 18" D x 63" H
• Rear panel: Cooling fans visible

Applications

Multi-point toxic gas monitors like the Telosense TGM are a standard safety system in semiconductor fabrication facilities and clean rooms, where a wide variety of highly toxic and flammable process gases — including arsine (AsH3), phosphine (PH3), diborane (B2H6), silane (SiH4), hydrogen selenide, and others — are used in CVD, ion implantation, and epitaxial growth processes. These systems monitor multiple gas use points (tool exhaust points, gas cabinet areas, storage rooms, and process bays) simultaneously, providing continuous area monitoring and automatic alarm notification when dangerous concentration levels are detected. The TGM's 16-line capacity makes it well suited for larger fab environments or tool clusters where many sample points need to be covered from a single central monitoring station. Systems of this type were widely deployed in semiconductor fabs from the late 1980s through the 2000s as part of emergency response and industrial hygiene programs, and replacement/repair units remain in demand for legacy fab operations and safety system maintenance.