Description
Technics West PE-IIGM Mass Flow Module IR Process Line 115V 60Hz For Parts
The Technics West PE-IIGM is a mass flow module chassis from the company's IR Process Line series of semiconductor gas-delivery and control systems. This unit was manufactured by Technics West Inc. of San Jose, California and dates to February 1982, placing it in the early 1980s era of semiconductor fabrication equipment. The chassis retains a substantial portion of its internal components but is being sold AS-IS for parts or repair and is not a complete, operational system.
Specifications & What's Included
- Manufacturer: Technics West Inc., San Jose, CA 95131
- Model: PE-IIGM
- Serial Number: 30611
- Manufacture Date: 2-12-82 (February 12, 1982)
- Input Voltage: 115V AC
- Current: 1A (lamp)
- Frequency: 60 Hz
- Country of Manufacture: USA
- Front panel: four LED digital displays with individual rotary/push controls
- Front panel gas channel labels (handwritten): Purge, Silane, DEF, Etch, and others
- Front panel switches/indicators: Argon, Silane, DEF, HX3, GFX labeled positions
- High Heat warning label on front panel
- Internal components retained: four red relay modules with orange capacitors and associated control wiring
- Internal components retained: four stacked black control/driver modules (right side interior)
- Internal components retained: transformer assembly
- Internal components retained: multi-conductor wiring harness throughout chassis
- Chassis construction: steel cabinet with red painted side panels, black top and frame
- Sold AS-IS — not a complete system; condition and completeness as shown in photos
Applications
Technics West was a California-based manufacturer of semiconductor process equipment in the 1970s and 1980s, producing plasma etch systems, CVD (chemical vapor deposition) reactors, and associated gas delivery and control hardware. The PE-IIGM Mass Flow Module was part of their IR Process Line — a series of infrared-process and gas-flow control systems used in wafer fabrication environments for controlling the delivery of process gases such as argon, silane, and etch gases to the reaction chamber. Mass flow modules of this type monitor and regulate the volumetric flow rate of each gas channel, providing the precise gas-ratio control required for repeatable etch and deposition processes. Equipment of this generation was used in university research labs, semiconductor R&D facilities, and early commercial wafer fabs during the formative era of the IC industry. Today, units like this are primarily sought for spare parts, relay modules, legacy system repair, and historical/educational reference, or as a source of quality internal components (relays, wiring, control modules) compatible with similar vintage Technics West systems.
This Technics West PE-IIGM Mass Flow Module is being sold AS-IS for parts or repair. The chassis is partially populated — it retains its internal wiring harness, four red relay modules with associated capacitors and wiring, stacked black control modules on the right side, and a transformer assembly, but is not a complete, operational system. It has not been tested and no functionality is guaranteed. The front panel shows handwritten gas-channel labels (Purge, Silane, DEF, Etch, etc.) and the unit carries a High Heat warning label, consistent with prior use in a semiconductor process environment. Exterior shows age-related wear including paint scuffs on the red side panels and general soiling on the front panel face. The rating plate on the side reads: Model PE-IIGM, 115V, 1A, 60Hz, Made in USA, dated 2-12-82. Sold strictly as-is — no returns on the basis of functionality. Please view our photo set and contact us if you have any questions.
Warranty Information
Additional Information
Brand: |
Technics West |
Model: |
PE-IIGM |
MPN: |
PE-IIGM |
Type: |
Mass Flow Module Chassis Cabinet |
SKU: |
47338 |
Condition: |
As-Is / For Parts or Not Working |
Seller Notes: |
Sold AS-IS; includes internal wiring, relay modules, and control components |
Country/Region of Manufacture: |
United States |
Voltage Rating: |
115V |
Current Rating: |
1A (lamp) |
Frequency: |
60 Hz |
Application / Use Case: |
Semiconductor IR Process Line gas flow control |
Form Factor: |
Benchtop Cabinet |
Power Requirements: |
115V AC, 60Hz, 1A |
Compatible With: |
Technics West IR Process Line semiconductor systems |
Serial Number Range: |
30611 (see label) |
Manufacture Date: |
2-12-82 |
Condition Notes: |
Technics West PE-IIGM Mass Flow Module sold AS-IS for parts or repair. Chassis retains internal wiring, relay modules, control modules, and transformer but is not a complete working system. Not tested, no functionality guaranteed. |