Thermco

Thermco SK15788-001 3-Loop Gas Flow Controller N2 O2 Rotameter Panel

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SKU:
36167
MPN:
SK15788-001
Condition:
Used
Availability:
Usually ships within 1-2 business days.
Weight:
24.00 LBS
Shipping:
Calculated at Checkout
  • Thermco SK15788-001 3-loop gas flow controller front panel showing four rotameter tubes labeled Nitrogen and Oxygen with two 0-30 PSI dial gauges and two regulator fittings
  • Close-up of dual 0-30 PSI pressure gauges and two metal regulator/needle valve fittings labeled N2 and O2 on the Thermco gas flow controller panel
  • Front view of Thermco SK15788-001 showing four rotameter flow tubes — two labeled Nitrogen and two labeled Oxygen — with needle valves at base of each tube
  • Rear view of Thermco SK15788-001 gas flow controller panel showing brass tubing manifold, pressure regulators, solenoid valves, and gas line fittings
  • Thermco Products Corp data plate showing Type: 3 Loop Gas, Part No. SK15788-001, Serial No. BP461I, W.O. 16011, Orange, California, U.S.A.
$175.00
Was: $350.00
Current Stock: 1

Sold Out

Description

Thermco SK15788-001 3-Loop Gas Flow Controller N2 O2 Rotameter Panel

This is a rack-mount gas flow controller panel designed to regulate and monitor nitrogen and oxygen flows in semiconductor processing equipment. It uses variable area rotameters (tube and float type) to measure gas flow rates.

Specifications & What's Included

  • Model: SK15788-001 | Manufacturer: Thermco Products
  • 3-loop configuration for N2 and O2 gas control
  • O2 flow ranges: 0–1 SLPM (small loop) and 0–12 SLPM (large loop) @ STP
  • N2 flow range: 0–12 SLPM @ STP
  • Two 0–30 PSI pressure gauges and two 0–150 unit gauges
  • Panel-mount / rack-mount form factor

Applications

This controller type is used in semiconductor diffusion furnaces and CVD (chemical vapor deposition) process tools to precisely meter carrier and process gases during wafer fabrication. Thermco diffusion furnace systems relied on these integrated gas control panels to manage multi-loop gas introduction at controlled flow rates and pressures. Commonly deployed in 1980s–2000s semiconductor manufacturing environments.

Condition: For Parts or Not Working
This Thermco Products SK15788-001 3-Loop Gas Flow Controller was removed from a larger semiconductor process tool and has not been tested at our facility. Due to its age and untested status, it is being sold strictly as-is with no guarantee of functionality. The front panel shows general wear consistent with process lab use, including surface oxidation and staining on the aluminum panel face and around the rotameter tubes. The brass gas fittings and tubing on the rear are intact but show age-related tarnishing. All four rotameter tubes and both 0-30 PSI gauges appear physically present and intact. Please view our photo set and contact us if you have any questions.
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Warranty Information

We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information

Brand:
Thermco Products
Model:
SK15788-001
MPN:
SK15788-001
Type:
3-Loop Gas Flow Controller Panel
SKU:
36167
Form Factor:
Rack Mount / Panel Mount
Number of Gas Loops:
3
Gas Types:
Nitrogen (N2), Oxygen (O2)
Flow Meter Type:
Variable Area Rotameter (Tube & Float)
Pressure Gauge Range:
0-30 PSI (x2)
Flow Range - O2 (small):
0-1 SLPM O2 @ STP, increments of 0.2
Flow Range - O2 (large):
0-12 SLPM O2 @ STP, increments of 0.2
Flow Range - N2:
0-12 SLPM N2 @ STP, increments of 0.2
Additional Gauge Range:
0-150 units, increments of 1 (x2)
Application:
Semiconductor Diffusion Furnace / CVD Process
Condition:
As-Is / For Parts or Not Working
Seller Notes:
Pulled from a larger semiconductor process tool; sold as-is, untested.
Country/Region of Manufacture:
United States
Compatible With:
Thermco diffusion furnace systems
Condition Notes:
Thermco SK15788-001 3-Loop Gas Flow Controller pulled from a semiconductor process tool. Not tested. Sold as-is with no functionality guarantee. Shows age wear. All rotameters and gauges appear physically intact. Contact us with questions.
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