Description
Thermco SK15788-001 3-Loop Gas Flow Controller N2 O2 Rotameter Panel
This is a rack-mount gas flow controller panel designed to regulate and monitor nitrogen and oxygen flows in semiconductor processing equipment. It uses variable area rotameters (tube and float type) to measure gas flow rates.
Specifications & What's Included
- Model: SK15788-001 | Manufacturer: Thermco Products
- 3-loop configuration for N2 and O2 gas control
- O2 flow ranges: 0–1 SLPM (small loop) and 0–12 SLPM (large loop) @ STP
- N2 flow range: 0–12 SLPM @ STP
- Two 0–30 PSI pressure gauges and two 0–150 unit gauges
- Panel-mount / rack-mount form factor
Applications
This controller type is used in semiconductor diffusion furnaces and CVD (chemical vapor deposition) process tools to precisely meter carrier and process gases during wafer fabrication. Thermco diffusion furnace systems relied on these integrated gas control panels to manage multi-loop gas introduction at controlled flow rates and pressures. Commonly deployed in 1980s–2000s semiconductor manufacturing environments.
This Thermco Products SK15788-001 3-Loop Gas Flow Controller was removed from a larger semiconductor process tool and has not been tested at our facility. Due to its age and untested status, it is being sold strictly as-is with no guarantee of functionality. The front panel shows general wear consistent with process lab use, including surface oxidation and staining on the aluminum panel face and around the rotameter tubes. The brass gas fittings and tubing on the rear are intact but show age-related tarnishing. All four rotameter tubes and both 0-30 PSI gauges appear physically present and intact. Please view our photo set and contact us if you have any questions.
Warranty Information
Additional Information
Brand: |
Thermco Products |
Model: |
SK15788-001 |
MPN: |
SK15788-001 |
Type: |
3-Loop Gas Flow Controller Panel |
SKU: |
36167 |
Form Factor: |
Rack Mount / Panel Mount |
Number of Gas Loops: |
3 |
Gas Types: |
Nitrogen (N2), Oxygen (O2) |
Flow Meter Type: |
Variable Area Rotameter (Tube & Float) |
Pressure Gauge Range: |
0-30 PSI (x2) |
Flow Range - O2 (small): |
0-1 SLPM O2 @ STP, increments of 0.2 |
Flow Range - O2 (large): |
0-12 SLPM O2 @ STP, increments of 0.2 |
Flow Range - N2: |
0-12 SLPM N2 @ STP, increments of 0.2 |
Additional Gauge Range: |
0-150 units, increments of 1 (x2) |
Application: |
Semiconductor Diffusion Furnace / CVD Process |
Condition: |
As-Is / For Parts or Not Working |
Seller Notes: |
Pulled from a larger semiconductor process tool; sold as-is, untested. |
Country/Region of Manufacture: |
United States |
Compatible With: |
Thermco diffusion furnace systems |
Condition Notes: |
Thermco SK15788-001 3-Loop Gas Flow Controller pulled from a semiconductor process tool. Not tested. Sold as-is with no functionality guarantee. Shows age wear. All rotameters and gauges appear physically intact. Contact us with questions. |