Description
RFPP RF25M 7521968010 RF Water Cooled Power Supply 2500W 3.8-4.2MHz 208V 3PH
The RFPP RF25M is a water-cooled RF power supply rated at 2500 watts, operating in the 3.8 to 4.2 MHz frequency range. Manufactured by RF Power Products (later acquired by Advanced Energy Industries), this unit is designed for high-power RF applications in semiconductor and industrial processing equipment. It accepts 208 VAC three-phase input at 50/60 Hz and delivers RF output through a rear-panel coaxial connector.
Specifications & What's Included
- Brand: RFPP (RF Power Products / Advanced Energy Industries)
- Model: RF25M
- MPN / Model Number: 7521968010
- Secondary Part Number: 660-093818-002, Revision E2
- Power Rating: 2500 Watts
- Frequency Range: 3.8 – 4.2 MHz
- Input Voltage: 208 VAC
- Input Phase: Three Phase (3PH)
- Input Frequency: 50/60 Hz
- Cooling Method: Water cooled — rear panel Water In, Water Out, and Water Valve ports
- RF Output: Rear-panel RF Out connector (large coaxial port)
- Control Interface: Analog Control connector on rear panel
- Front Panel: Digital display, Program and Options keys, navigation buttons, RF ON/OFF, Power ON/OFF
- Form Factor: Rackmount
- Dimensions: 26" W x 19" D x 7" H
- Country of Manufacture: USA
- Date of Manufacture: November 1997
- Unit only — no matching RF match network or cables included
Applications
RF power supplies in the 3.8–4.2 MHz range are used primarily in plasma-based semiconductor fabrication processes, including plasma-enhanced chemical vapor deposition (PECVD), reactive ion etching (RIE), and physical vapor deposition (PVD) sputtering. In these systems, the RF generator drives a matching network and electrode to sustain a plasma discharge inside a process chamber at controlled power levels. The RF25M's water-cooling design allows it to sustain continuous high-duty-cycle operation in production fab environments where air cooling would be insufficient. RFPP was a well-established supplier of RF power systems for semiconductor OEMs and tool makers throughout the 1990s before being absorbed into Advanced Energy Industries. Units of this type are still actively sought as spare or replacement generators for legacy etch and deposition tools that remain in production use, as well as for university research reactors and pilot-line process systems. The front-panel digital display and programmable controls allow process engineers to set and monitor forward power directly from the unit.
This RFPP RF25M RF Water Cooled Power Supply has been inspected and appears to be in good condition. It was pulled from a working environment where it was previously in active use. The unit shows normal wear consistent with its service history — the top cover has some surface scuffing and there is light wear on the chassis, but the front panel, display area, and rear panel connectors all look clean and intact. Due to its size and weight, this unit will need to ship on a small pallet. Please view our photo set and contact us if you have any questions.
Warranty Information
Additional Information
Brand: |
RFPP (RF Power Products / Advanced Energy Industries) |
Model: |
RF25M |
MPN: |
7521968010 |
Secondary Model: |
660-093818-002 E2 |
SKU: |
52059 |
Type: |
RF Water Cooled Power Supply |
Power Rating: |
2500 Watts |
Frequency Range: |
3.8 - 4.2 MHz |
Input Voltage: |
208 VAC |
Phase: |
Three Phase (3PH) |
Input Frequency: |
50/60 Hz |
Cooling Method: |
Water Cooled |
RF Output Connector: |
RF Out (rear panel) |
Control Interface: |
Analog Control (rear panel) |
Front Panel Controls: |
Program, Options, navigation keys, RF On/Off, Power On/Off |
Water Connections: |
Water In, Water Out, Water Valve (rear panel) |
Form Factor: |
Rackmount |
Dimensions: |
26" x 19" x 7" |
Application: |
Plasma Etch, Sputtering, Semiconductor Processing |
Country/Region of Manufacture: |
USA |
Date of Manufacture: |
11/97 (November 1997) |
Condition: |
Used – Pulled from Working Environment |
Seller Notes: |
Unit only; ships on a small pallet due to size and weight. |
Condition Notes: |
RFPP RF25M RF Water Cooled Power Supply, 2500W 3.8-4.2MHz. Pulled from a working environment, inspected and in good condition. Normal surface wear on chassis. Ships on a small pallet. |
