Description
Plasma-Therm HFS-10000D RF Generator 10KW 13.56MHz 208/240V For Parts
The Plasma-Therm HFS-10000D is a high-power 13.56 MHz RF plasma generator rated at 10 kilowatts of incident output power. Manufactured by Plasma-Therm Inc. of Kresson, New Jersey — also historically marketed under the RF Plasma Products (RFPP) brand — this is a large floor-standing cabinet-style generator designed to drive plasma discharge chambers in semiconductor fabrication and industrial plasma processing systems. This unit is being sold AS-IS for parts or repair; the power amplifier (PA) tube is missing and other components may also be absent.
Specifications & What's Included
- Manufacturer: Plasma-Therm Inc. (also marketed as RFPP / RF Plasma Products)
- Model: HFS-10000D (Type HFS 10,000D)
- Output Frequency: 13.56 MHz (ISM band, standard for plasma processing)
- Output Power: 10 kW incident RF
- Input Voltage: 208 / 240 VAC
- Form Factor: Floor-standing teal steel cabinet
- Front Panel Meters: Incident RF Power (0–11 kW), Reflected RF Power (0–1.1 kW), PA Plate DC Amperes (0–4A), Percent Multimeter (0–100%)
- Multimeter selector: Multiple positions including V3 IK (1000 mA), V2 IK (250 mA), V1 IK (25 mA), V3 IG (50 mA), V2 IG (2.5 mA), V3 EC (500V), HV Supply (10 kV), LV Supply (500V), +12V Supply (25V), V3 ISG (250 mA), V4 IK (5A)
- PA Loading control: Rotary switch panel on front door
- PA Tuning control: Rotary lever arm on front door
- Main control panel: START / STOP pushbuttons, RF ON / RF OFF buttons, OL RESET, VSWR ALARM, Manual Power Control knob, Operating Mode selector (Local / Remote), Auto / Manual switch
- Power Control Modes: Automatic Incident, Automatic Reflected, Automatic Auxiliary, Manual
- Overload indicators: HV OL, LV OL, PA OL, IPA OL with reset
- Overload breakers: K4 (IPA OL), K5 (HV OL), K6 (LV OL), K7 (PA OL)
- Elapsed hours meter: Industrial Controls Inc. unit mounted on control panel
- LINE section: Three-pole main line contactor/switch
- Fuse complement: F1 10A, F2 10A, F3 5A, F4 1-6/10A, F5 3A, F6 5A, F7 1/4A
- Internal cooling: Rotron Centrimax blower, Model CX33A2G, 115V, 50/60Hz, 9.8A, single phase, thermally protected
- Internal power section: Large high-voltage and filament transformers, filter choke inductors, wiring harness visible in photos
- RF coupling section: Incident coupler assembly with coaxial fittings and RF load block; Reflected/Incident power pickup panel
- PA tank coil: Large copper spiral inductor visible in PA section (tube absent from socket)
- PA tube: MISSING — socket is empty
- Other components or parts may also be missing — review all photos before purchasing
Applications
The 13.56 MHz frequency is the globally allocated ISM (Industrial, Scientific, and Medical) band frequency used universally for plasma excitation in semiconductor manufacturing. RF generators of this type are the RF power source in plasma etch systems (reactive ion etch / RIE, barrel etch), plasma-enhanced chemical vapor deposition (PECVD), sputtering systems, and other plasma-assisted thin-film processes. The HFS-10000D at 10 kW is a high-power unit suited to large-chamber or production-scale plasma reactors. Plasma-Therm — originally based in New Jersey and later a major Florida-based semiconductor equipment company — produced this class of generator through the 1970s and 1980s for use with their own etch and deposition systems as well as for OEM integration into other manufacturers' tools. Units of this design use a high-power vacuum tube in the PA stage (the missing component here) to amplify the 13.56 MHz drive signal to kilowatt output levels, with the PA tuning and loading network matching the output impedance to the plasma load. Buyers of this unit are typically engineers or technicians sourcing the cabinet, transformers, meters, tuning network, or other subcomponents for repair or integration into another system.
This Plasma-Therm HFS-10000D 10KW 13.56 MHz RF Plasma Generator is being sold AS-IS for parts or repair. The power amplifier tube is missing from the PA section, and other components or parts may also be absent — please review all photos carefully before purchasing, as what you see is what you get. The unit is a large floor-standing teal cabinet in generally fair cosmetic condition with normal wear consistent with industrial service use. The front panel meters (Incident RF Power, Reflected RF Power, PA Plate DC Amperes, and Multimeter), PA Loading and PA Tuning controls, and the main control panel with Start/Stop, RF On/Off, Operating Mode, and overload indicators appear to be present and intact. The internal power section is visible in photos and includes large transformers, a Rotron Centrimax blower (CX33A2G, 115V), fuse banks, and RF coupling components. This unit has not been tested and is not guaranteed functional. Please view our photo set and contact us if you have any questions.
Warranty Information
Additional Information
Brand: |
Plasma-Therm |
Model: |
HFS-10000D |
MPN: |
HFS-10000D |
Secondary Model: |
HFS 10,000D |
Type: |
RF Plasma Generator |
SKU: |
42466 |
Seller Notes: |
Large floor-standing cabinet only — tube missing; other parts may be missing. No cables included. |
Output Frequency: |
13.56 MHz |
Output Power: |
10 kW |
Input Voltage: |
208 / 240 VAC |
Phase: |
Three Phase |
Application: |
Plasma Etch, CVD, Semiconductor Processing |
Form Factor: |
Floor-Standing Cabinet |
Cooling: |
Forced Air — Rotron Centrimax Blower CX33A2G |
Blower Model: |
Rotron Centrimax CX33A2G, 115V, 9.8A, 50/60Hz |
Meters: |
Incident RF Power (0-11 kW), Reflected RF Power (0-1.1 kW), Multimeter, PA Plate DC Amperes |
Tuning Network: |
PA Loading and PA Tuning controls (rotary/lever type) |
Overload Protection: |
HV OL, LV OL, PA OL, IPA OL indicators and breakers (K4–K7) |
Power Controls: |
Manual Power Control knob; Automatic Incident, Reflected, Auxiliary modes |
Hours Meter: |
Industrial Controls Inc. elapsed-time meter present |
Country/Region of Manufacture: |
United States |
Compatible With: |
Plasma etch and CVD systems requiring 13.56 MHz RF excitation |
Fuse Complement: |
F1 10A, F2 10A, F3 5A, F4 1-6/10A, F5 3A, F6 5A, F7 1/4A |
Manufacturer Location: |
Plasma-Therm Inc., Rte 73, Kresson, NJ 08053 |
Condition Notes: |
Plasma-Therm HFS-10000D 10KW RF Plasma Generator sold AS-IS for parts. PA tube is missing; other parts may also be absent. Not tested, not functional. Review all photos carefully before purchasing. |
California Prop 65 Warning: |
WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov |
