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Parker Technology

Parker Technologies PS2000 Gap Etch Metrology System 230V 50Hz SECS IBM EDTA2

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SKU:
36583
MPN:
PS2000
Condition:
Used
Availability:
Usually ships within 5-7 business days — please contact us regarding freight arrangements for this large system.
Weight:
1,437.00 LBS
Shipping:
Calculated at Checkout
  • Parker Technologies PS2000 Gap Etch Metrology System – full front view of white freestanding cabinet with multiple compartment doors, status light tower, and E.M.O. stop button on top panel
  • Parker Technologies PS2000 – internal IBM PC controller compartment showing CRT monitor, keyboard, and mouse on slide-out tray
  • Parker Technologies PS2000 – internal fluid and pneumatics compartment viewed through window, showing flow meters, solenoid valves, pressure gauges, and tubing manifold
  • Parker Technologies PS2000 – Replenishment Compartment interior showing NaOH-labeled solenoid valve manifold, tubing, and brass pressure regulators
  • Parker Technologies PS2000 – internal computer bay showing IBM PC tower, floppy drive, PS2000 Installation User Manual booklet, and APC Smart-UPS
  • Parker Technologies PS2000 – lower cabinet compartment showing three large HDPE carboys labeled for chemical reagent storage
  • Parker Technologies PS2000 – top control panel detail showing Door, Leak, Exhaust indicator lights, E.M.O. emergency mushroom stop button, ON/OFF switches, and warning label
  • Parker Technologies PS2000 – top panel detail showing tri-color status light tower (amber/blue/green) and Dwyer Photohelic differential pressure gauge labeled General Exhaust
  • Parker Technologies PS2000 – upper cabinet interior showing twin compartments with filter/regulator assembly, reagent bottles labeled DI Water/Replenisher, and fluid manifold valves
  • Parker Technologies PS2000 – front panel lower section showing Replenishment Pumps (EDTA, NaOH, Decant) and Service Carboy/Carboy 1/Carboy 2 indicator/control buttons, Parker Technologies branding
  • Parker Technologies PS2000 – rear panel view showing electrical enclosure with terminal strips, circuit breakers, EMO button, and wiring harness on pallet
  • Parker Technologies PS2000 – rating plate label: Baujahr 1999, Model GAP ETCH METROLOGY SYSTEM, Model No. P2MPC01/P2AT02/P2R100001/P2LCU01, Supply Voltage 230VAC, Single Phase, 50Hz, 13A, CB 20A
  • Parker Technologies PS2000 – internal etch chamber area showing air/water filter-regulator assembly with pressure gauge and polypropylene chemical tubing
  • Parker Technologies PS2000 – rear fluid connection panel showing Gap Etch Tool 1 and Tool 2 manifolds with labeled push-to-connect fittings for EDTA, NaOH, Decant, Waste, Sample, DI H2O; DI Water and Nitrogen utility ports at left
  • Parker Technologies PS2000 – external interface panel showing Modem RJ-11 port, two HOST DB-9 connectors, DB-25 SECS Interface connector, and DB-25 Printer Port
  • Parker Technologies PS2000 – external connector panel showing five multi-pin circular connectors labeled Level/Handshake 1, Level/Handshake 2, and Facilities EPO
$3,000.00
Was: $6,000.00
Current Stock: 1

Sold Out

Description

Parker Technologies PS2000 Gap Etch Metrology System 230V 50Hz SECS IBM EDTA2

Gap etch wet chemistry metrology system for semiconductor fabrication process control. Monitors and analyzes chemical parameters during gap etch operations using wet chemistry methods including pH, ORP, colorimetric titration, and direct pH analysis.

Specifications & What's Included

  • Model: PS2000 (Manufacture Year: 1999); IBM EDTA2 control system
  • Power: 230VAC, Single Phase, 50Hz, 13A full load; 20A circuit breaker
  • Communication: SECS interface (DB-25), 2x RS-232 HOST ports (DB-9), parallel printer port
  • Gas/fluid connections: Oil-free air 1/2 NPT, nitrogen 1/4 NPT, DI water 1/4 NPT
  • Analysis methods: pH, ORP, colorimetric titration, direct pH measurement
  • Chemical replenishment: 3-carboy station system with EDTA, NaOH reagents
  • Includes: IBM PC with CRT monitor, keyboard, mouse; APC Smart-UPS; PS2000 manuals and IBM EDTA2 documentation

Applications

Used in semiconductor fabrication facilities for real-time process control of gap etch operations. Integrates with fab automation via SECS communication protocol and legacy IBM equipment. Monitors chemical bath composition and concentration to maintain process specifications during wet chemistry etching steps. Freestanding cabinet workstation with integrated fluid handling, analysis, and replenishment systems.

Condition: Used
This Parker Technologies PS2000 Gap Etch Metrology System has been inspected and appears to be in good condition. The cabinet exterior is clean with minor surface marks consistent with normal lab use. Internal compartments, fluid manifolds, tubing, and the IBM PC controller are all present and visible in the photos. The APC Smart-UPS and PS2000 Installation/User Manual are included. This is a large freestanding workstation — please contact us to discuss freight arrangements before purchasing. Please view our photo set and contact us if you have any questions.
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Warranty Information

We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information

Brand:
Parker Technologies
Model:
PS2000
MPN:
P2MPC01 / P2AT02 / P2R100001 / P2LCU01
Secondary Model:
IBM EDTA2
SKU:
36583
Type:
Gap Etch Wet Chemistry Metrology System
Manufacture Year:
1999
Electrical Diagram No.:
S1DE0027
Supply Voltage:
230 VAC
Phase:
Single Phase
Frequency:
50 Hz
Full Load Current:
13A
Circuit Breaker Rating:
20A
Short Circuit Interrupt Current:
10KA I.C. @ 250VAC
Power Requirements:
230VAC, Single Phase, 50Hz, 13A Full Load
Gas Requirements:
Oil-Free Air 1/2 NPT-F; Nitrogen 1/4 NPT-F
DI Water Connection:
1/4 NPT
Waste Line:
Required — see documentation
Communication Interface:
SECS (Semiconductor Equipment Comm. Standard)
Host Ports:
2x DB-9 RS-232 HOST connectors
SECS Interface:
DB-25 SECS Interface connector
Modem Port:
RJ-11 telephone/modem port
Printer Port:
DB-25 parallel printer port
Level/Handshake Connectors:
2x multi-pin circular (Level/Handshake 1 & 2)
Facilities EPO Connector:
Multi-pin circular (Facilities EPO)
Control Computer:
IBM PC with CRT monitor, keyboard, mouse
UPS:
APC Smart-UPS (included)
Chemical Reagents:
EDTA, NaOH, Decant pump lines
Replenishment System:
3x carboy stations (Service Carboy, Carboy 1, Carboy 2)
Analysis Capability:
pH, ORP, Colorimetric Titration, Direct pH
Tool Connections:
Gap Etch Tool 1 and Tool 2 fluid manifolds
Exhaust Monitoring:
Dwyer Photohelic differential pressure gauge
Safety Features:
E.M.O. mushroom stop, Door/Leak/Exhaust indicators
Form Factor:
Freestanding Cabinet Workstation
Condition:
Used – Inspected
Seller Notes:
Includes PS2000 Installation/User Manual and IBM EDTA2 engineering documents; APC UPS included
Application:
Semiconductor Fab Gap Etch Process Wet Chemistry Control
Country/Region of Manufacture:
Germany
Condition Notes:
Parker Technologies PS2000 Gap Etch Metrology System. Inspected, appears in good used condition. Cabinet clean with minor wear. IBM PC, APC UPS, and PS2000 manual included. Large system — freight required. Contact us with questions.
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