Description
Parker Technologies PS2000 Gap Etch Metrology System 230V 50Hz SECS IBM EDTA2
Gap etch wet chemistry metrology system for semiconductor fabrication process control. Monitors and analyzes chemical parameters during gap etch operations using wet chemistry methods including pH, ORP, colorimetric titration, and direct pH analysis.
Specifications & What's Included
- Model: PS2000 (Manufacture Year: 1999); IBM EDTA2 control system
- Power: 230VAC, Single Phase, 50Hz, 13A full load; 20A circuit breaker
- Communication: SECS interface (DB-25), 2x RS-232 HOST ports (DB-9), parallel printer port
- Gas/fluid connections: Oil-free air 1/2 NPT, nitrogen 1/4 NPT, DI water 1/4 NPT
- Analysis methods: pH, ORP, colorimetric titration, direct pH measurement
- Chemical replenishment: 3-carboy station system with EDTA, NaOH reagents
- Includes: IBM PC with CRT monitor, keyboard, mouse; APC Smart-UPS; PS2000 manuals and IBM EDTA2 documentation
Applications
Used in semiconductor fabrication facilities for real-time process control of gap etch operations. Integrates with fab automation via SECS communication protocol and legacy IBM equipment. Monitors chemical bath composition and concentration to maintain process specifications during wet chemistry etching steps. Freestanding cabinet workstation with integrated fluid handling, analysis, and replenishment systems.
This Parker Technologies PS2000 Gap Etch Metrology System has been inspected and appears to be in good condition. The cabinet exterior is clean with minor surface marks consistent with normal lab use. Internal compartments, fluid manifolds, tubing, and the IBM PC controller are all present and visible in the photos. The APC Smart-UPS and PS2000 Installation/User Manual are included. This is a large freestanding workstation — please contact us to discuss freight arrangements before purchasing. Please view our photo set and contact us if you have any questions.
Warranty Information
Additional Information
Brand: |
Parker Technologies |
Model: |
PS2000 |
MPN: |
P2MPC01 / P2AT02 / P2R100001 / P2LCU01 |
Secondary Model: |
IBM EDTA2 |
SKU: |
36583 |
Type: |
Gap Etch Wet Chemistry Metrology System |
Manufacture Year: |
1999 |
Electrical Diagram No.: |
S1DE0027 |
Supply Voltage: |
230 VAC |
Phase: |
Single Phase |
Frequency: |
50 Hz |
Full Load Current: |
13A |
Circuit Breaker Rating: |
20A |
Short Circuit Interrupt Current: |
10KA I.C. @ 250VAC |
Power Requirements: |
230VAC, Single Phase, 50Hz, 13A Full Load |
Gas Requirements: |
Oil-Free Air 1/2 NPT-F; Nitrogen 1/4 NPT-F |
DI Water Connection: |
1/4 NPT |
Waste Line: |
Required — see documentation |
Communication Interface: |
SECS (Semiconductor Equipment Comm. Standard) |
Host Ports: |
2x DB-9 RS-232 HOST connectors |
SECS Interface: |
DB-25 SECS Interface connector |
Modem Port: |
RJ-11 telephone/modem port |
Printer Port: |
DB-25 parallel printer port |
Level/Handshake Connectors: |
2x multi-pin circular (Level/Handshake 1 & 2) |
Facilities EPO Connector: |
Multi-pin circular (Facilities EPO) |
Control Computer: |
IBM PC with CRT monitor, keyboard, mouse |
UPS: |
APC Smart-UPS (included) |
Chemical Reagents: |
EDTA, NaOH, Decant pump lines |
Replenishment System: |
3x carboy stations (Service Carboy, Carboy 1, Carboy 2) |
Analysis Capability: |
pH, ORP, Colorimetric Titration, Direct pH |
Tool Connections: |
Gap Etch Tool 1 and Tool 2 fluid manifolds |
Exhaust Monitoring: |
Dwyer Photohelic differential pressure gauge |
Safety Features: |
E.M.O. mushroom stop, Door/Leak/Exhaust indicators |
Form Factor: |
Freestanding Cabinet Workstation |
Condition: |
Used – Inspected |
Seller Notes: |
Includes PS2000 Installation/User Manual and IBM EDTA2 engineering documents; APC UPS included |
Application: |
Semiconductor Fab Gap Etch Process Wet Chemistry Control |
Country/Region of Manufacture: |
Germany |
Condition Notes: |
Parker Technologies PS2000 Gap Etch Metrology System. Inspected, appears in good used condition. Cabinet clean with minor wear. IBM PC, APC UPS, and PS2000 manual included. Large system — freight required. Contact us with questions. |