Parker Technology

Parker Technologies PS2000 Gap Etch Metrology System 230V 50Hz SECS IBM EDTA2

Parker Technology

SKU:

36583

Availability:

Usually ships within 5-7 business days — please contact us regarding freight arrangements for this large system.

Weight:

1,437.00 LBS

Brand:

Parker Technologies

Model:

PS2000

MPN:

P2MPC01 / P2AT02 / P2R100001 / P2LCU01

Secondary Model:

IBM EDTA2

SKU:

36583

Type:

Gap Etch Wet Chemistry Metrology System

Manufacture Year:

1999

Electrical Diagram No.:

S1DE0027

Supply Voltage:

230 VAC

Phase:

Single Phase

Frequency:

50 Hz

Full Load Current:

13A

Circuit Breaker Rating:

20A

Short Circuit Interrupt Current:

10KA I.C. @ 250VAC

Power Requirements:

230VAC, Single Phase, 50Hz, 13A Full Load

Gas Requirements:

Oil-Free Air 1/2 NPT-F; Nitrogen 1/4 NPT-F

DI Water Connection:

1/4 NPT

Waste Line:

Required — see documentation

Communication Interface:

SECS (Semiconductor Equipment Comm. Standard)

Host Ports:

2x DB-9 RS-232 HOST connectors

SECS Interface:

DB-25 SECS Interface connector

Modem Port:

RJ-11 telephone/modem port

Printer Port:

DB-25 parallel printer port

Level/Handshake Connectors:

2x multi-pin circular (Level/Handshake 1 & 2)

Facilities EPO Connector:

Multi-pin circular (Facilities EPO)

Control Computer:

IBM PC with CRT monitor, keyboard, mouse

UPS:

APC Smart-UPS (included)

Chemical Reagents:

EDTA, NaOH, Decant pump lines

Replenishment System:

3x carboy stations (Service Carboy, Carboy 1, Carboy 2)

Analysis Capability:

pH, ORP, Colorimetric Titration, Direct pH

Tool Connections:

Gap Etch Tool 1 and Tool 2 fluid manifolds

Exhaust Monitoring:

Dwyer Photohelic differential pressure gauge

Safety Features:

E.M.O. mushroom stop, Door/Leak/Exhaust indicators

Form Factor:

Freestanding Cabinet Workstation

Condition:

Used – Inspected

Seller Notes:

Includes PS2000 Installation/User Manual and IBM EDTA2 engineering documents; APC UPS included

Application:

Semiconductor Fab Gap Etch Process Wet Chemistry Control

Country/Region of Manufacture:

Germany

Condition Notes:

Parker Technologies PS2000 Gap Etch Metrology System. Inspected, appears in good used condition. Cabinet clean with minor wear. IBM PC, APC UPS, and PS2000 manual included. Large system — freight required. Contact us with questions.