Parker Technology

Parker Technologies PS2000 Gap Etch Metrology System 230V 50Hz SECS IBM EDTA2

Parker Technology

SKU:

36583

Availability:

Usually ships within 5-7 business days — please contact us regarding freight arrangements for this large system.

Weight:

1,437.00 LBS

Brand:

Parker Technologies

Model:

PS2000

MPN:

P2MPC01 / P2AT02 / P2R100001 / P2LCU01

Secondary Model:

IBM EDTA2

SKU:

36583

Type:

Gap Etch Wet Chemistry Metrology System

Manufacture Year:

1999

Electrical Diagram No.:

S1DE0027

Supply Voltage:

230 VAC

Phase:

Single Phase

Frequency:

50 Hz

Full Load Current:

13A

Circuit Breaker Rating:

20A

Short Circuit Interrupt Current:

10KA I.C. @ 250VAC

Power Requirements:

230VAC, Single Phase, 50Hz, 13A Full Load

Gas Requirements:

Oil-Free Air 1/2 NPT-F; Nitrogen 1/4 NPT-F

DI Water Connection:

1/4 NPT

Waste Line:

Required — see documentation

Communication Interface:

SECS (Semiconductor Equipment Comm. Standard)

Host Ports:

2x DB-9 RS-232 HOST connectors

SECS Interface:

DB-25 SECS Interface connector

Modem Port:

RJ-11 telephone/modem port

Printer Port:

DB-25 parallel printer port

Level/Handshake Connectors:

2x multi-pin circular (Level/Handshake 1 & 2)

Facilities EPO Connector:

Multi-pin circular (Facilities EPO)

Control Computer:

IBM PC with CRT monitor, keyboard, mouse

UPS:

APC Smart-UPS (included)

Chemical Reagents:

EDTA, NaOH, Decant pump lines

Replenishment System:

3x carboy stations (Service Carboy, Carboy 1, Carboy 2)

Analysis Capability:

pH, ORP, Colorimetric Titration, Direct pH

Tool Connections:

Gap Etch Tool 1 and Tool 2 fluid manifolds

Exhaust Monitoring:

Dwyer Photohelic differential pressure gauge

Safety Features:

E.M.O. mushroom stop, Door/Leak/Exhaust indicators

Form Factor:

Freestanding Cabinet Workstation

Condition:

Used – Inspected

Seller Notes:

Includes PS2000 Installation/User Manual and IBM EDTA2 engineering documents; APC UPS included

Application:

Semiconductor Fab Gap Etch Process Wet Chemistry Control

Country/Region of Manufacture:

Germany

Condition Notes:

Parker Technologies PS2000 Gap Etch Metrology System. Inspected, appears in good used condition. Cabinet clean with minor wear. IBM PC, APC UPS, and PS2000 manual included. Large system — freight required. Contact us with questions.

California Prop 65 Warning:

WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov