Nordiko 250mm Planar DC Ion Beam Etch Grid Set Molybdenum Semiconductor IBD

Nordiko 250mm Planar DC Ion Beam Etch Grid Set Molybdenum Semiconductor IBD

This is a Nordiko planar DC ion beam etch grid set designed for 250mm wafer processing in ion beam deposition (IBD) and ion beam etching (IBE) systems. The set includes the full multi-grid assembly — molybdenum grids and ceramic spacer/insulator elements — and has been refurbished and is ready for direct installation into a compatible Nordiko ion beam system. The usable beam diameter is approximately 200mm.

Specifications & What's Included

• Manufacturer: Nordiko
• Grid set type: Planar DC broad ion beam (multi-grid assembly)
• Wafer size compatibility: 250mm
• Approximate beam diameter: ~200mm
• Grid material: Molybdenum
• Insulator/spacer material: Ceramic
• Part number (engraved on outer ring): A01445 155A
• Outer housing/ring: Stainless steel with circumferential bolt/mounting holes
• Configuration: Multi-grid stack (accelerator/decelerator grid arrangement visible in edge profile)
• Condition of ceramics: No visible re-deposition — appears new
• Condition of molybdenum grids: Lightly used
• Status: Refurbished, ready to install

Applications

Ion beam etch grids are a core consumable component in ion beam deposition (IBD) and ion beam etching (IBE) systems used in semiconductor and thin-film manufacturing. In these systems, an ion source generates a directed beam of ions — typically argon or other inert gas — that is shaped and accelerated by a multi-grid assembly (typically a two- or three-grid set of screen, accelerator, and decelerator grids) before striking the substrate or target. The molybdenum grid material is standard for high-energy DC ion beam applications due to its high melting point, low sputter yield, and dimensional stability under sustained ion bombardment. Ceramic spacers electrically isolate the individual grids and maintain precise inter-grid spacing critical to beam optics. Nordiko is a UK-based manufacturer whose ion beam systems have been widely used in the semiconductor, data storage (hard disk), and optical coating industries since the 1980s and 1990s. This 250mm planar grid set is appropriate for production or R&D tools processing up to 200–250mm substrates in PVD, IBD, or ion milling applications. Replacement or refurbished grid sets are sought by facilities maintaining legacy Nordiko IBD tools, where original spare parts are no longer in active production supply.