LFE

LFE PFS/PCrE/PDS-501 ICP Barrel Plasma Etch System 115V 300W Semiconductor

LFE

SKU:

44794

Availability:

This item requires freight shipping. Contact us for a shipping quote before purchasing.

Weight:

282.00 LBS

Brand:

LFE Corporation

Model:

PFS/PCrE/PDS-501

MPN:

PFS/PCrE/PDS-501

Type:

ICP Barrel Plasma Etch System

SKU:

44794

Condition:

As-Is / For Parts or Not Working

Seller Notes:

One compartment has a missing component. Sold as-is for parts or repair. Freight shipping required.

Country/Region of Manufacture:

United States

Manufacturer Division:

LFE Process Control Division

Manufacturer Location:

Waltham, Massachusetts

Voltage:

115V

Power Rating:

300W

Frequency:

50/60 Hz

Interior Barrel Diameter:

13.5 inches

Overall Dimensions:

36" W x 34" D x 32" H

Process Modes:

Clean, Etch, Strip, Etch-Strip, Clean-Etch-Strip

RF Power Monitor:

Forward and Reflected, analog meter

DC Volts Display:

Simpson digital DC Volts meter

Cycle Timers:

3 independent electromechanical timers (Min:Sec) for Clean, Etch, Strip

Gas Flow Controls:

3 independent RF Power and Gas Flow controls (Clean, Etch, Strip)

Front Panel Controls:

Power, RF Power, Cycle Select, Cycle Start, Vacuum Release, Cycle Complete

Tester Connector:

Multi-pin diagnostic connector on lower front panel

Cooling:

Integrated exhaust fan

Application:

Semiconductor plasma etching, photoresist stripping, chrome etch

Form Factor:

Freestanding Cabinet

Shipping Method:

Freight Required

Condition Notes:

LFE PFS/PCrE/PDS-501 ICP Barrel Plasma Etch System sold as-is for parts/repair. Physically intact with good cosmetic condition overall, but one interior compartment has a missing component. Not tested. Freight shipping required (~240 lbs).