LFE

LFE PFS/PCrE/PDS-501 ICP Barrel Plasma Etch System 115V 300W Semiconductor

LFE

SKU:

44794

Availability:

This item requires freight shipping. Contact us for a shipping quote before purchasing.

Weight:

282.00 LBS

Brand:

LFE Corporation

Model:

PFS/PCrE/PDS-501

MPN:

PFS/PCrE/PDS-501

Type:

ICP Barrel Plasma Etch System

SKU:

44794

Condition:

As-Is / For Parts or Not Working

Seller Notes:

One compartment has a missing component. Sold as-is for parts or repair. Freight shipping required.

Country/Region of Manufacture:

United States

Manufacturer Division:

LFE Process Control Division

Manufacturer Location:

Waltham, Massachusetts

Voltage:

115V

Power Rating:

300W

Frequency:

50/60 Hz

Interior Barrel Diameter:

13.5 inches

Overall Dimensions:

36" W x 34" D x 32" H

Process Modes:

Clean, Etch, Strip, Etch-Strip, Clean-Etch-Strip

RF Power Monitor:

Forward and Reflected, analog meter

DC Volts Display:

Simpson digital DC Volts meter

Cycle Timers:

3 independent electromechanical timers (Min:Sec) for Clean, Etch, Strip

Gas Flow Controls:

3 independent RF Power and Gas Flow controls (Clean, Etch, Strip)

Front Panel Controls:

Power, RF Power, Cycle Select, Cycle Start, Vacuum Release, Cycle Complete

Tester Connector:

Multi-pin diagnostic connector on lower front panel

Cooling:

Integrated exhaust fan

Application:

Semiconductor plasma etching, photoresist stripping, chrome etch

Form Factor:

Freestanding Cabinet

Shipping Method:

Freight Required

Condition Notes:

LFE PFS/PCrE/PDS-501 ICP Barrel Plasma Etch System sold as-is for parts/repair. Physically intact with good cosmetic condition overall, but one interior compartment has a missing component. Not tested. Freight shipping required (~240 lbs).

California Prop 65 Warning:

WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov