Leybold

Leybold DryVac 25B Dry Vacuum Pump 208-230/460V 2.8kW Water Cooled Semiconductor

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SKU:
51734
MPN:
25B
Condition:
Used
Availability:
Currently out of stock — contact us for availability.
Weight:
365.00 LBS
Shipping:
Calculated at Checkout
  • Leybold DryVac 25B dry vacuum pump — front-left view showing DRYVAC logo on white cabinet, accordion bellows top panel, and stainless steel exhaust elbow
  • Leybold DryVac 25B dry vacuum pump — rear view showing power inlet, water-in fittings with red caps, cooling hose, warning labels, and black exhaust port
  • Leybold DryVac 25B rating plate — Type 25B, Cat. No. 13800, Fab. No. A920200004, 400V VAC, 11A, 2.8kW, 3600 RPM, 50-60Hz, ultimate pressure 3/1.5x10^-2 mbar, max exhaust 1500 mbar
  • Leybold DryVac 25B rear panel close-up — CAUTION water drain label, POWER switch, WATER-IN fittings (max 10 bar) with red protective caps, and cooling water hose connection
  • Leybold DryVac 25B rear interface panel — labeled INTERFACE with X18 and X19 sub-D connectors (DB15 and DB9) for external control integration
  • Leybold DryVac 25B pump mechanism — housing removed showing dry claw/screw pump body, stainless steel inlet elbow, drive motor, and wiring harness on caster base
  • Leybold DryVac 25B pump mechanism — opposite side view showing motor, pump body, stainless inlet flange, yellow wiring leads, and motor junction box on caster frame
  • Leybold DryVac 25B motor thermal switch junction box — wiring diagram label showing configurations for 380V/50Hz, 460V/60Hz, 208-230V/60Hz, and 200V/50Hz operation
  • Leybold DryVac 25B motor terminal box — open cover showing three-phase terminal block with yellow-green ground wire, black and yellow power leads wired for 220V operation
$923.00
Was: $1,500.00

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Description

Leybold DryVac 25B Dry Vacuum Pump 208-230/460V 2.8kW Water Cooled Semiconductor

The Leybold DryVac 25B is a dry-compression vacuum pump designed primarily for semiconductor etching and CVD (chemical vapor deposition) processes. It uses an oil-free dry compression mechanism, eliminating the need for pump fluid in the process gas stream — an important requirement in clean semiconductor and thin-film manufacturing environments. The unit is water cooled and mounts on a wheeled caster base for ease of positioning.

Specifications & What's Included

  • Manufacturer: Leybold (Leybold Vacuum Products Inc., Export, PA)
  • Model: DryVac 25B (Type 25B)
  • Cat. No.: 13800
  • Fab. No.: A920200004
  • Power Rating (60 Hz): 208–230/460V AC, 11A, 2.8 kW, 3600 RPM
  • Power Rating (50 Hz): 200/380V AC, 11A, 2.8 kW, 3600 RPM
  • Phase: Three-phase
  • Frequency: 50/60 Hz
  • Ultimate Pressure: 3/1.5 × 10⁻² mbar
  • Max Exhaust Pressure: 1500 mbar (abs.)
  • Cooling: Water cooled; water inlet max 10 bar
  • Vacuum port outer diameter: 95 mm
  • Vacuum port inner diameter: 70 mm
  • Interface connectors: X18 and X19 sub-D connectors (rear panel) for external control/interlock wiring
  • Motor thermal switch junction box included (supports 380V/50Hz, 460V/60Hz, 208–230V/60Hz, 200V/50Hz wiring configurations)
  • Currently wired for 220V AC
  • Mounted on wheeled caster base
  • Overall dimensions: 28" L × 15" W × 22" H

Applications

The Leybold DryVac series is a line of dry-running screw/claw vacuum pumps widely used in semiconductor fabrication, particularly for plasma etch reactors, CVD chambers, and PVD systems where oil contamination of the process gas is unacceptable. Dry pumps like the DryVac 25B became the standard replacement for oil-sealed rotary vane pumps in fabs during the 1990s, as process cleanliness requirements tightened with shrinking device geometries. They are also used in flat-panel display manufacturing, solar cell deposition, general industrial vacuum applications, and research environments requiring a clean, dry fore-vacuum. The water-cooled design makes the 25B well suited to continuous-duty fab environments where heat rejection is critical. Compatible with aggressive process chemistries that would degrade oil-sealed pumps.

Condition: Used
This Leybold DryVac 25B Dry Vacuum Pump has been powered and tested at our facility and is in good working order. The pump powers on, draws approximately 11 amps under load, and pumps strongly. It is currently wired for 220V AC. Please note that as a used pump, it may need oil, servicing, or a rebuild kit to reach its full factory specifications. The exterior cabinet shows normal wear consistent with industrial use. The cooling water fittings have protective caps in place, and the stainless steel inlet elbow is intact. This pump requires freight shipping — please contact us for a quote, to arrange local pickup, or to schedule a viewing at our facility. Please view our photo set and contact us if you have any questions.
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Warranty Information

We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information

Brand:
Leybold
Model:
DryVac 25B
MPN:
25B
Type:
Dry Compression Vacuum Pump
SKU:
51734
Cat. No.:
13800
Fab. No.:
A920200004
Voltage (60Hz):
208-230/460V AC
Voltage (50Hz):
200/380V AC
Current Rating:
11 A
Motor Power:
2.8 kW
Rotational Speed:
3600 RPM
Frequency:
50/60 Hz
Phase:
Three Phase
Cooling Method:
Water Cooled
Water Inlet Pressure:
Max 10 bar
Ultimate Pressure:
3/1.5 x 10^-2 mbar
Max Exhaust Pressure:
1500 (abs.) mbar
Vacuum Port OD:
95 mm
Vacuum Port ID:
70 mm
Interface Connectors:
X18 and X19 (DB9/DB15 sub-D, rear panel)
Application:
Semiconductor etching, CVD, dry process vacuum
Dimensions:
28" L x 15" W x 22" H
Country/Region of Manufacture:
United States
Seller Notes:
Pump only on caster base with cooling hose and motor junction box; no external plumbing or process connections included.
Condition Notes:
This Leybold DryVac 25B Dry Vacuum Pump has been powered and tested — powers on, draws ~11A, and pumps strongly. Currently wired for 220V AC. May need oil, service, or a rebuild kit to reach full factory specs. Freight required.
California Prop 65 Warning:
WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
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Leybold DryVac 50 S Dry Compression Vacuum Pump 13844 400V 3-Phase 2.8kW 45m³/h

Leybold

$3,000.00
Was: $6,000.00
Leybold DryVac 50 S Dry Compression Vacuum Pump 13844 400V 3-Phase 2.8kW 45m³/hThe Leybold DryVac 50 S is an industrial-grade dry compression vacuum pump designed for semiconductor fabrication,...
44764
SKU:
44764
Availability:
Freight shipping required. Contact us for shipping quote, local pickup, or facility viewing.
Weight:
480.00 LBS
Brand:
Leybold
Model:
DryVac 50 S
MPN:
13844
Secondary Model:
L011620112
Type:
Dry Compression Vacuum Pump
SKU:
44764
Seller Notes:
Pump unit on casters; freight shipping required. Contact for quote.
Country/Region of Manufacture:
United States
Pumping Speed (50 Hz):
45 m³/h (26 cfm)
Pumping Speed (60 Hz):
55 m³/h (32 cfm)
Ultimate Pressure (50 Hz):
4.0 × 10⁻² mbar
Ultimate Pressure (60 Hz):
2.5 × 10⁻² mbar
Max. Intake Pressure (Continuous):
500 mbar (375 Torr)
Max. Exhaust Pressure:
1500 mbar (abs.)
Motor Power:
2.8 kW (50 Hz) / 3 kW (60 Hz)
Voltage:
400 VAC
Current:
6.3 A
Phase:
Three Phase
Frequency:
50 Hz / 60 Hz
Rotational Speed (50 Hz):
3000 rpm
Rotational Speed (60 Hz):
3600 rpm
Power Connector:
IEC 60309 4-pin industrial plug (red, 400V)
Interface / Connectivity:
Parallel Interface (X18, X19 — DB9 connectors)
Utility Connections:
Compressed air (≤7 bar), dry nitrogen (≤10 bar), water (≤10 bar)
Control Panel:
START, STOP, FLUSH, STAND BY, REPORT buttons; LCD display
Form Factor:
Floor-Standing, Mobile (4-wheel casters)
Thermostat Valve:
AVTA thermostatic water valve (25–65°C)
Internal Circuit Breakers:
Siemens 5SX21 C8 and C2 (230/400V)
Motor Protectors:
Moeller PKZM0-16 and PKZM0-1.6
Internal Transformer:
Marx transformer, Prim 200-460V, Sek 24/18V
Application:
CVD, Al-Etch, Si-Etch, TEOS, WSix-LPCVD semiconductor processes
Certifications:
CE
Condition Notes:
Leybold DryVac 50 S dry compression vacuum pump (model 13844) has been inspected and is in good used condition, pulled from a working environment. Shows minor exterior wear and a scratched LCD lens. Freight shipping required.
Power Rating:
2.8 kW (50 Hz) / 3 kW (60 Hz)
Max. Intake Pressure:
500 mbar continuous (375 Torr)
Interface Type:
Parallel (DB9 X18, X19 connectors)
Control Panel Features:
START, STOP, FLUSH, STAND BY, REPORT buttons; LCD display
Applications:
CVD, Al-Etch, Si-Etch, TEOS, WSix-LPCVD semiconductor processes
California Prop 65 Warning:
WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov