Description
Leybold DryVac 50 S Dry Compression Vacuum Pump 13844 400V 3-Phase 2.8kW 45m³/h
The Leybold DryVac 50 S is an industrial-grade dry compression vacuum pump designed for semiconductor fabrication, thin-film deposition, and laboratory applications where oil-free operation is critical. Operating without lubricant, this pump delivers consistent evacuation performance while avoiding substrate contamination. The unit is floor-mounted on four-wheel casters for flexible laboratory or production placement and includes integrated water cooling and compressed-air purge systems for extended operating life.
Specifications & What's Included
- Model: DryVac 50 S, Cat. No. 13844, secondary model L011620112
- Pumping speed: 45 m³/h (26 cfm) at 50 Hz / 55 m³/h (32 cfm) at 60 Hz
- Ultimate vacuum pressure: 4.0 × 10⁻² mbar (50 Hz) / 2.5 × 10⁻² mbar (60 Hz)
- Maximum continuous intake pressure: 500 mbar (375 Torr)
- Maximum exhaust pressure: 1500 mbar (absolute)
- Motor power: 2.8 kW (50 Hz) / 3 kW (60 Hz)
- Electrical supply: 400 VAC, three-phase, 6.3 A nominal
- Rotational speed: 3000 rpm (50 Hz) / 3600 rpm (60 Hz)
- Power connector: IEC 60309 4-pin industrial plug (red, 400V)
- Control interface: Parallel connections via DB9 connectors (X18, X19)
- Utility connections: Compressed air inlet (max 7 bar), dry nitrogen supply (max 10 bar), water cooling in/out (max 10 bar)
- Thermostat valve: AVTA thermostatic unit (25–65°C control range)
- Control panel: START, STOP, FLUSH, STAND BY, REPORT buttons with LCD display
- Internal circuit breakers: Siemens 5SX21 C8 and C2 (230/400V rated)
- Motor protectors: Moeller PKZM0-16 and PKZM0-1.6 overload protection
- Internal transformer: Marx transformer (primary 200–460V, secondary 24/18V)
- Form factor: Floor-standing, mobile base with four swivel casters
- Certification: CE marked
- Country of manufacture: United States
Applications
The DryVac 50 S operates in semiconductor fabrication for chemical vapor deposition (CVD), aluminum etch, silicon etch, TEOS, and tungsten silicide LPCVD processes. This pump is standard equipment in research laboratories, wafer fab production lines, and thin-film deposition chambers where contamination-free vacuum is essential. The dry compression design eliminates the need for pump oils, making it ideal for processes sensitive to organic vapors and suited for both legacy systems and modern semiconductor equipment. The mobile caster base allows repositioning within a facility, and integrated control electronics support both local panel operation and remote monitoring via the parallel interface connections. The combination of moderate pumping speed (45–55 m³/h) and low ultimate pressure (10⁻² mbar range) makes it well-suited for medium-scale vacuum processes in research and production environments.
This Leybold DryVac 50 S dry compression vacuum pump (model 13844) has been inspected and is in good used condition. It was pulled from an operational production environment. The unit shows minor cosmetic wear consistent with industrial service; the LCD display lens has light scratching but remains readable. All control panel functions and utility connections are intact. Freight shipping is required; please contact us for a shipping quote, to arrange local pickup, or to schedule an in-person viewing at our facility. Please view our photo set and contact us if you have any questions. Please note: We have multiple units in stock — yours may not be the one shown in the photos, however, it will be similar in condition and function.
Warranty Information
Additional Information
Brand: |
Leybold |
Model: |
DryVac 50 S |
MPN: |
13844 |
Secondary Model: |
L011620112 |
Type: |
Dry Compression Vacuum Pump |
SKU: |
44764 |
Seller Notes: |
Pump unit on casters; freight shipping required. Contact for quote. |
Country/Region of Manufacture: |
United States |
Pumping Speed (50 Hz): |
45 m³/h (26 cfm) |
Pumping Speed (60 Hz): |
55 m³/h (32 cfm) |
Ultimate Pressure (50 Hz): |
4.0 × 10⁻² mbar |
Ultimate Pressure (60 Hz): |
2.5 × 10⁻² mbar |
Max. Intake Pressure (Continuous): |
500 mbar (375 Torr) |
Max. Exhaust Pressure: |
1500 mbar (abs.) |
Motor Power: |
2.8 kW (50 Hz) / 3 kW (60 Hz) |
Voltage: |
400 VAC |
Current: |
6.3 A |
Phase: |
Three Phase |
Frequency: |
50 Hz / 60 Hz |
Rotational Speed (50 Hz): |
3000 rpm |
Rotational Speed (60 Hz): |
3600 rpm |
Power Connector: |
IEC 60309 4-pin industrial plug (red, 400V) |
Interface / Connectivity: |
Parallel Interface (X18, X19 — DB9 connectors) |
Utility Connections: |
Compressed air (≤7 bar), dry nitrogen (≤10 bar), water (≤10 bar) |
Control Panel: |
START, STOP, FLUSH, STAND BY, REPORT buttons; LCD display |
Form Factor: |
Floor-Standing, Mobile (4-wheel casters) |
Thermostat Valve: |
AVTA thermostatic water valve (25–65°C) |
Internal Circuit Breakers: |
Siemens 5SX21 C8 and C2 (230/400V) |
Motor Protectors: |
Moeller PKZM0-16 and PKZM0-1.6 |
Internal Transformer: |
Marx transformer, Prim 200-460V, Sek 24/18V |
Application: |
CVD, Al-Etch, Si-Etch, TEOS, WSix-LPCVD semiconductor processes |
Certifications: |
CE |
Review Status: |
Auto-Approved (needs review) 2026-07-04 |
Condition Notes: |
Leybold DryVac 50 S dry compression vacuum pump (model 13844) has been inspected and is in good used condition, pulled from a working environment. Shows minor exterior wear and a scratched LCD lens. Freight shipping required. |
Power Rating: |
2.8 kW (50 Hz) / 3 kW (60 Hz) |
Max. Intake Pressure: |
500 mbar continuous (375 Torr) |
Interface Type: |
Parallel (DB9 X18, X19 connectors) |
Control Panel Features: |
START, STOP, FLUSH, STAND BY, REPORT buttons; LCD display |
Applications: |
CVD, Al-Etch, Si-Etch, TEOS, WSix-LPCVD semiconductor processes |