Integrated Time

Integrated Time Systems Wafer Mask Cleaner Developer ITS Sonotek Ion Systems ECD

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SKU:
42651
MPN:
Stainless Steel
Condition:
Used
Availability:
Usually ships within 5-7 business days; large industrial item — please contact us for freight shipping details.
Weight:
445.00 LBS
Shipping:
Calculated at Checkout
  • Integrated Time Systems wafer mask cleaner developer system front view showing stainless steel enclosure with blue cabinet doors, front control panel with digital displays, pressure gauges, and Sonotek controller on top
  • Rear view of ITS wafer mask cleaner developer system showing complex wiring, fluid plumbing, Grundfos pump, compressor, and breakout box
  • Sonotek spray nozzle power controller front panel showing Coarse and Fine power adjust knobs, Analog Output jack, power switch with green LED, and Nozzle Power/Watts digital display
  • ITS Integrated Time Systems Microprocessor Control Center front panel labeled Layer 1 Developer 002 with digital readouts for Left/Right Manifold Pressure, VRP Rate RPM, VRP Speed Set, Temperature Control, and chemical control buttons
  • ITS Microprocessor Control Center I/O reference label showing Inputs (Chamber Door, Sump Tank, Cooling, Chem Temp, VRP Motor, High Level, Chiller Interlock, Left/Right Manifold, DI Water, CDA, Nitrogen) and Outputs (Process Spray, Heaters, Chem/DI/CDA to Chamber, Diverter Valve, CETC Pump, VRP Motor, Flush, Overtemp Cutoff, Filter, Cooling Coil, Bulk Fill)
  • ITS Microprocessor Control Center keypad and display panel showing Recipe, Cycle, Time displays, Total Time Remaining display, hex keypad, and Mode/Alarm Silence/Abort/Reset/Run-Hold buttons
  • 3M 722 Work Station Monitor ESD wrist strap monitor showing OK, H, and L indicator LEDs mounted on stainless steel bracket
  • Two United Instruments pressure gauges 0-60 psi / 0-4 bar mounted on stainless steel manifold fittings
  • Wafer mask cleaner process chamber top view through transparent lid showing stainless steel frame and yellow wafer/mask holders
  • Interior of wafer mask cleaning chamber top-down view showing spray nozzle cross pattern, yellow mask/wafer holders, white roller guides, and stainless steel chamber walls
  • Left side cabinet door open showing internal cable routing and plumbing entering the lower cabinet section
  • Lower cabinet interior showing fluid plumbing with PVC pipes, blue filter canisters, manual valves with red handles, and chemical routing manifold
  • Close-up of nitrogen and DI Water In inlet fittings labeled on white panel surface with stainless steel compression fittings and tubing connections
  • Globtek TA2CH000B01 power supply label showing Input 230V 50Hz, Output 24V AC 1A, CE marked, date code 0896
  • Ion Systems AirForce ionizer nozzle/gun with hose attached, showing Ion Systems logo and Not Calibrated sticker
  • Ion Systems AirForce Z-Stat 6115 Ionizer with IsoStat Technology label, showing filter/brush element partially exposed
  • Waste Drain and Chemical connection panel showing gray PVC drain pipe connected to waste drain fitting and blue filter canister
  • Internal chemical pump array showing three diaphragm pumps labeled Nitrogen, DI #3, and Chemical with manifold valves
  • Close-up of Flush pump/valve showing diaphragm pump labeled FLUSH in yellow text with blue filter canister and tubing
  • Flush Out connection port on white exterior panel showing braided stainless hose connection and staining/residue on panel surface near port
  • Integrated Time Stainless Steel Microprocessor-Controlled Wafer Mask Cleaner
  • Integrated Time Stainless Steel Microprocessor-Controlled Wafer Mask Cleaner
  • Integrated Time Stainless Steel Microprocessor-Controlled Wafer Mask Cleaner
  • Integrated Time Stainless Steel Microprocessor-Controlled Wafer Mask Cleaner
  • Integrated Time Stainless Steel Microprocessor-Controlled Wafer Mask Cleaner
$900.00
Was: $1,800.00
Current Stock: 1

Sold Out

Description

Integrated Time Systems Wafer Mask Cleaner Developer ITS Sonotek Ion Systems ECD

Semiconductor wafer and photomask cleaning and photoresist development system. Stainless steel freestanding floor unit with integrated microprocessor control center for spray cleaning and chemical processing operations.

Specifications & What's Included

  • Model: ITS Microprocessor Control Center (MPN: AU311FT-141)
  • Sonotek spray controller with nozzle power display and coarse/fine adjustment
  • Ion Systems AirForce Z-Stat 6115 ionizer with IsoStat Technology
  • Tecumseh compressor, Grundfos pump, multiple chemical/DI/nitrogen pumps and valves
  • 3M 722 ESD work station monitor, ECD controller, Globtek 24V auxiliary power supply
  • Tank dimensions: 12" x 13" x 10" deep (5" x 10" effective)
  • Two manifold pressure gauges (0-60 psi / 0-4 bar)
  • Fluid inputs: chemical, DI water, nitrogen, CDA; outputs: waste drain, flush, chemical spray

Applications

Wafer mask cleaner and developer systems are used in semiconductor manufacturing for spray cleaning photoresist from silicon wafers and photomasks during photolithography processes. These integrated systems manage chemical delivery, temperature control, ESD monitoring, and waste collection for semiconductor fabrication facilities and photomask production operations.

Condition: For Parts or Not Working
This Integrated Time Systems microprocessor-controlled wafer mask cleaner and developer system is being sold AS-IS for parts or repair. The unit has not been tested and we cannot confirm whether it is complete or functional — it may be missing parts or have faults we are not able to identify without testing. The system includes the ITS Microprocessor Control Center, Sonotek spray nozzle controller, Ion Systems AirForce Z-Stat 6115 ionizer, ECD controller, Tecumseh AU311FT-141 compressor, Grundfos pump, 3M 722 Work Station Monitor, Globtek 24V AC auxiliary power supply, and extensive chemical, DI water, nitrogen, and CDA fluid plumbing. The stainless steel cabinet shows general wear consistent with lab use; some chemical residue and staining is visible on the exterior panel near the flush-out port. Please view our photo set and contact us if you have any questions.
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Warranty Information

We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information

Brand:
Integrated Time Systems
Model:
ITS Microprocessor Control Center
MPN:
AU311FT-141
Type:
Wafer Mask Cleaner / Chemical Developer System
SKU:
42651
Condition:
As-Is / For Parts or Not Working
Seller Notes:
Includes Sonotek spray controller, Ion Systems AirForce Z-Stat 6115 ionizer, ECD controller, Grundfos pump, Tecumseh compressor, 3M 722 workstation monitor, Globtek power supply, multiple chemical/DI/nitrogen pumps and valves
Application / Use Case:
Semiconductor wafer/photomask photoresist development and spray cleaning
Control System:
Integrated Time Systems Microprocessor Control Center
Compressor:
Tecumseh AU311FT-141
Pump:
Grundfos
Spray Controller:
Sonotek (Nozzle Power/Watts display, Coarse/Fine power adjust)
Ionizer:
Ion Systems AirForce Z-Stat 6115 IsoStat Technology
ESD Monitor:
3M 722 Work Station Monitor
Power Supply (Aux):
Globtek TA2CH000B01, Input 230V 50Hz, Output 24V AC 1A
Tank Size Overall:
12 in x 13 in x 10 in deep
Tank Size Effective:
5 in x 10 in
Fluid Inputs:
Chemical, DI Water, Nitrogen, CDA
Fluid Outputs:
Waste Drain, Flush Out, Chemical pump output
Pressure Gauges:
Two manifold pressure gauges, 0-60 psi / 0-4 bar
Control Inputs:
Chamber Door, Sump Tank Low/Full, Over Temp, Cooling, Chem Temp, VRP Motor, High Level, Chiller Interlock, Left/Right Manifold, DI Water, CDA, Nitrogen
Control Outputs:
Process Spray, Heaters, Chem/DI/CDA to Chamber, Diverter Valve, CETC Pump, VRP Motor, Flush, Overtemp Cutoff, Filter, Cooling Coil, Bulk Fill
Enclosure Material:
Stainless Steel
Form Factor:
Freestanding Floor Unit
Country/Region of Manufacture:
United States
Condition Notes:
ITS wafer mask cleaner/developer sold AS-IS for parts or repair. Not tested; completeness and functionality unknown. Includes Sonotek controller, Ion Systems Z-Stat 6115 ionizer, Tecumseh compressor, Grundfos pump.
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