Integrated Time

Integrated Time Systems Wafer Mask Cleaner Developer ITS Sonotek Ion Systems ECD

Integrated Time

SKU:

42651

Availability:

Usually ships within 5-7 business days; large industrial item — please contact us for freight shipping details.

Weight:

445.00 LBS

Brand:

Integrated Time Systems

Model:

ITS Microprocessor Control Center

MPN:

AU311FT-141

Type:

Wafer Mask Cleaner / Chemical Developer System

SKU:

42651

Condition:

As-Is / For Parts or Not Working

Seller Notes:

Includes Sonotek spray controller, Ion Systems AirForce Z-Stat 6115 ionizer, ECD controller, Grundfos pump, Tecumseh compressor, 3M 722 workstation monitor, Globtek power supply, multiple chemical/DI/nitrogen pumps and valves

Application / Use Case:

Semiconductor wafer/photomask photoresist development and spray cleaning

Control System:

Integrated Time Systems Microprocessor Control Center

Compressor:

Tecumseh AU311FT-141

Pump:

Grundfos

Spray Controller:

Sonotek (Nozzle Power/Watts display, Coarse/Fine power adjust)

Ionizer:

Ion Systems AirForce Z-Stat 6115 IsoStat Technology

ESD Monitor:

3M 722 Work Station Monitor

Power Supply (Aux):

Globtek TA2CH000B01, Input 230V 50Hz, Output 24V AC 1A

Tank Size Overall:

12 in x 13 in x 10 in deep

Tank Size Effective:

5 in x 10 in

Fluid Inputs:

Chemical, DI Water, Nitrogen, CDA

Fluid Outputs:

Waste Drain, Flush Out, Chemical pump output

Pressure Gauges:

Two manifold pressure gauges, 0-60 psi / 0-4 bar

Control Inputs:

Chamber Door, Sump Tank Low/Full, Over Temp, Cooling, Chem Temp, VRP Motor, High Level, Chiller Interlock, Left/Right Manifold, DI Water, CDA, Nitrogen

Control Outputs:

Process Spray, Heaters, Chem/DI/CDA to Chamber, Diverter Valve, CETC Pump, VRP Motor, Flush, Overtemp Cutoff, Filter, Cooling Coil, Bulk Fill

Enclosure Material:

Stainless Steel

Form Factor:

Freestanding Floor Unit

Country/Region of Manufacture:

United States

Condition Notes:

ITS wafer mask cleaner/developer sold AS-IS for parts or repair. Not tested; completeness and functionality unknown. Includes Sonotek controller, Ion Systems Z-Stat 6115 ionizer, Tecumseh compressor, Grundfos pump.

California Prop 65 Warning:

WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov