Integrated Time

Integrated Time Systems Wafer Mask Cleaner Developer ITS Sonotek Ion Systems ECD

Integrated Time

SKU:

42651

Availability:

Usually ships within 5-7 business days; large industrial item — please contact us for freight shipping details.

Weight:

445.00 LBS

Brand:

Integrated Time Systems

Model:

ITS Microprocessor Control Center

MPN:

AU311FT-141

Type:

Wafer Mask Cleaner / Chemical Developer System

SKU:

42651

Condition:

As-Is / For Parts or Not Working

Seller Notes:

Includes Sonotek spray controller, Ion Systems AirForce Z-Stat 6115 ionizer, ECD controller, Grundfos pump, Tecumseh compressor, 3M 722 workstation monitor, Globtek power supply, multiple chemical/DI/nitrogen pumps and valves

Application / Use Case:

Semiconductor wafer/photomask photoresist development and spray cleaning

Control System:

Integrated Time Systems Microprocessor Control Center

Compressor:

Tecumseh AU311FT-141

Pump:

Grundfos

Spray Controller:

Sonotek (Nozzle Power/Watts display, Coarse/Fine power adjust)

Ionizer:

Ion Systems AirForce Z-Stat 6115 IsoStat Technology

ESD Monitor:

3M 722 Work Station Monitor

Power Supply (Aux):

Globtek TA2CH000B01, Input 230V 50Hz, Output 24V AC 1A

Tank Size Overall:

12 in x 13 in x 10 in deep

Tank Size Effective:

5 in x 10 in

Fluid Inputs:

Chemical, DI Water, Nitrogen, CDA

Fluid Outputs:

Waste Drain, Flush Out, Chemical pump output

Pressure Gauges:

Two manifold pressure gauges, 0-60 psi / 0-4 bar

Control Inputs:

Chamber Door, Sump Tank Low/Full, Over Temp, Cooling, Chem Temp, VRP Motor, High Level, Chiller Interlock, Left/Right Manifold, DI Water, CDA, Nitrogen

Control Outputs:

Process Spray, Heaters, Chem/DI/CDA to Chamber, Diverter Valve, CETC Pump, VRP Motor, Flush, Overtemp Cutoff, Filter, Cooling Coil, Bulk Fill

Enclosure Material:

Stainless Steel

Form Factor:

Freestanding Floor Unit

Country/Region of Manufacture:

United States

Condition Notes:

ITS wafer mask cleaner/developer sold AS-IS for parts or repair. Not tested; completeness and functionality unknown. Includes Sonotek controller, Ion Systems Z-Stat 6115 ionizer, Tecumseh compressor, Grundfos pump.