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Harris/Farinon

Harris/Farinon 1107 Heated Wafer Chuck 2.25" Vacuum Holder Semiconductor Tool

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SKU:
43437
MPN:
1107
Condition:
Used
Availability:
Usually ships within 1-2 business days.
Weight:
6.00 LBS
Shipping:
Calculated at Checkout
  • Harris/Farinon 1107 heated wafer chuck — front 3/4 view showing 2.25-inch circular vacuum plate, rectangular tray extension, black body, multi-pin mil-spec connector, and clear pneumatic tubing
  • Harris/Farinon 1107 heated wafer chuck — top/rear view showing underside of 2.25-inch vacuum plate with mounting screw holes, brass side fitting, and pneumatic tubing loop
  • Harris/Farinon Components Equipment No. 1107 — close-up of aluminum identification label on black body
  • Harris/Farinon 1107 — two 2.25-inch wafer chuck discs shown side by side: flat plain disc (left) and disc with center vacuum port fitting (right), both showing metallic wear
  • Harris/Farinon 1107 — close-up of clear silicone pneumatic vacuum tubing end showing hollow bore
  • Harris/Farinon 1107 — close-up of 5-pin mil-spec circular power/signal connector with gold contacts
  • Harris/Farinon 1107 — close-up of brass barb fitting on side of black cylindrical body, part of heating/cooling jacket circuit
$225.00
Was: $450.00
Current Stock: 1

Sold Out

Description

Harris/Farinon 1107 Heated Wafer Chuck 2.25" Vacuum Holder Semiconductor Tool

Heated vacuum wafer chuck designed for semiconductor wafer handling, positioning, and thermal processing. Uses pneumatic vacuum and resistive heating elements to hold and heat wafers during fabrication and inspection operations.

Specifications & What's Included

  • Model: Harris/Farinon 1107
  • Wafer diameter: 2.25 inches
  • Heating elements: 2x resistive; 1x temperature sensor
  • Vacuum: Pneumatic via center-hollow bolt
  • Connector: 5-pin mil-spec circular
  • Thermal jacket: Brass barb fitting with cooling/heating capability
  • Includes: Vacuum tubing, mil-spec power/signal cable, two wafer discs

Applications

Used in semiconductor wafer processing and inspection systems for holding, heating, and positioning wafers during fabrication steps. Typically integrated into probe stations, test equipment, and processing tools that require thermal control and secure wafer mounting. The 2.25" chuck accommodates smaller wafers and research-scale applications.

Condition: Used
This Harris/Farinon 1107 heated vacuum wafer chuck is in used condition and has been visually inspected. The unit shows normal wear consistent with prior lab or semiconductor process use. The black body and circular 2.25-inch vacuum plate are intact. Two separate wafer discs are included (visible in photos), both showing surface oxidation and use marks on their faces. The clear silicone pneumatic tubing is present and the hollow-bore vacuum line appears intact. The multi-pin mil-spec circular power/signal connector (5-pin, gold contacts) shows light oxidation on the shell but contacts appear clean. The brass barb fitting on the body side is present and undamaged. No cracks or major physical damage are observed. The unit has not been bench-tested at our facility. Please view our photo set and contact us if you have any questions.
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Warranty Information

We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information

Brand:
Harris/Farinon
Model:
1107
MPN:
1107
Type:
Heated Vacuum Wafer Chuck
SKU:
43437
Condition:
Used – Inspected
Seller Notes:
Includes vacuum tubing and multi-pin mil-spec power/signal cable.
Country/Region of Manufacture:
United States
Application / Use Case:
Semiconductor wafer handling, heating, and vacuum chucking
Wafer / Plate Diameter:
2.25 in
Vacuum Type:
Pneumatic vacuum via center-hollow bolt
Connector Type:
Multi-pin mil-spec circular connector (5-pin visible)
Heating Elements:
2x resistive heating elements
Sensor:
1x temperature sensor pin
Coolant / Thermal Jacket:
Brass barb fitting; heating/cooling jacket in round black body
Vacuum Fitting:
Clear silicone pneumatic tubing
Form Factor:
Benchtop / Freestanding
Compatible With:
Semiconductor wafer processing and inspection systems
Condition Notes:
Harris/Farinon 1107 heated vacuum wafer chuck in used condition. Visually inspected; normal wear, surface oxidation on wafer discs. Two discs included. Mil-spec connector and pneumatic tubing present. Not bench-tested. Contact us with questions.
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Tegal 803 Plasma Inline RF Wafer Etcher Semiconductor Etch Tool For Parts

Tegal

$1,500.00
Was: $3,000.00
Tegal 803 Plasma Inline RF Wafer Etcher Semiconductor Etch Tool For PartsInline RF plasma wafer etcher designed for semiconductor processing. This motorized system performs reactive ion etching (RIE)...
42622
SKU:
42622
Availability:
Usually ships within 3-5 business days via freight carrier — contact us to arrange.
Weight:
350.00 LBS
Brand:
Tegal
Model:
803
MPN:
803
Type:
Inline RF Plasma Wafer Etcher
SKU:
42622
Condition:
As-Is / For Parts or Not Working
Seller Notes:
Sold as-is for parts or repair. Cover removed; all major components present.
Country/Region of Manufacture:
United States
Serial Number (Internal):
8030293
Application / Use Case:
RF Plasma Etching, Semiconductor Wafer Processing
Process Type:
RF Plasma Etch (Reactive Ion Etch / RIE)
Configuration:
Inline Automatic
Gas Inputs:
4 process gas lines (GAS 1, GAS 2, GAS 3, GAS 4) + cleaning gas
Control Panel:
Volts/Torr, % Flow/MFC, Temperature, Watts, Process Status, Wafer Status
Vacuum Connection:
To Vacuum Pump port visible on rear panel
Coolant Connections:
Coolant In / Coolant Out ports on rear panel
Power Connection:
Heavy-duty multi-pin plug (visible in photos)
Power Outlets:
Chart & Service Power Outlets, 24 VAC, DC Supply on control chassis
Form Factor:
Freestanding Inline System
Approximate Weight:
~400 lbs — freight shipping required
Wafer Handler:
Motorized inline wafer transport with end effectors on both sides
Interlock:
Top cover interlock and Interlock Reset present
Compatible With:
Tegal 803 series plasma etch process modules
Manufacturer Location:
Tegal Corporation, Novato, CA 94947
Condition Notes:
Tegal 803 Plasma Inline RF Wafer Etcher sold as-is for parts or repair. Untested, no functionality guaranteed. Major internal components present. ~400 lbs, freight required. Please review photos and contact us with questions.