Description
CTI Cryogenics 140316 Helium Compressor Supply & Return Lines Aeroquip Pair
The CTI Cryogenics 140316 is a matched pair of rigid helium transfer lines — one supply and one return — used to connect a CTI cryopump compressor to the cryopump cold head. Each line is formed from stainless steel tubing bent to the compressor's standard routing geometry, with Aeroquip quick-disconnect coupling halves at each end to allow tool-free connection and disconnection in the field. These lines carry high-pressure helium gas between the compressor unit and the cold head as part of the closed-loop refrigeration cycle that drives cryogenic cooling.
Specifications & What's Included
- CTI Cryogenics part number: 140316
- Quantity: 1 pair — one supply line and one return line
- Tube construction: rigid stainless steel, bent to compressor routing profile
- Female coupling (each line, one end): Aeroquip 5400-S5-4
- Female coupling inlet thread: 1/2"-20
- Female coupling outlet thread: 5/8"-18UNF
- Male coupling (each line, opposite end): Aeroquip 5400-S2-4
- Male coupling inlet thread: 1/2"-20
- Male coupling outlet thread: 5/8"-18UNF
- Hex nut body size: 0.75" (3/4")
- Coupling style: Aeroquip quick-disconnect with internal valve and flat-face seal
Applications
CTI Cryogenics (now part of Brooks Automation) produces On-Board and On-Board Express cryopump systems widely used in semiconductor process equipment — including physical vapor deposition (PVD), chemical vapor deposition (CVD), ion implant, and general high-vacuum chambers. The compressor supply and return lines are the gas-side link between the external helium compressor and the cryopump cold head mounted on the chamber. In a typical installation the compressor pressurizes helium, which flows through the supply line to the cold head expander stage, expands to produce cooling, and returns through the return line at lower pressure. These lines must be removed and replaced whenever a compressor or cold head is swapped out during maintenance, making OEM replacement parts like the 140316 pair a common service item for facilities maintaining CTI-equipped vacuum systems.
This CTI Cryogenics 140316 helium compressor supply and return line pair has been inspected and is in good condition. Both lines were pulled from a working cryopump compressor environment where they were actively in use. The stainless tubing is straight and undamaged, and the Aeroquip quick-disconnect couplings on both ends are intact with no visible damage to the sealing faces or threads. Please view our photo set and contact us if you have any questions. Please note: We have multiple units in stock — yours may not be the one shown in the photos, however, it will be similar in condition and function.
Warranty Information
Additional Information
Brand: |
CTI Cryogenics |
Model: |
140316 |
MPN: |
140316 |
Type: |
Helium Compressor Supply & Return Lines |
SKU: |
27665 |
Condition: |
Used – Pulled from Working Environment |
Quantity: |
1 Pair (Supply & Return) |
Connector 1 – Female Coupling: |
Aeroquip 5400-S5-4, Inlet: 1/2"-20, Outlet: 5/8"-18UNF |
Connector 2 – Male Coupling: |
Aeroquip 5400-S2-4, Inlet: 1/2"-20, Outlet: 5/8"-18UNF |
Hex Nut Size: |
0.75" (3/4") |
Thread – Inlet: |
1/2"-20 |
Thread – Outlet: |
5/8"-18UNF |
Compatible With: |
CTI Cryogenics On-Board Cryopump Compressors |
Application: |
Cryopump helium supply and return gas transfer |
Seller Notes: |
Sold as a matched pair — one supply line and one return line. |
Condition Notes: |
CTI Cryogenics 140316 helium compressor line pair inspected and in good condition. Pulled from a working cryopump environment. Stainless tubing and Aeroquip couplings intact, no visible damage. Please view photos and contact us with questions. |
