Description
CHA Industries CHA-600 Indium Vacuum Evaporator 18" Bell Jar Diffusion Pump
The CHA Industries CHA-600 is a floor-standing vacuum thermal evaporation system designed for thin film deposition on semiconductor wafers and substrates. It uses a high-speed oil diffusion pump to achieve the high vacuum levels required for thermal evaporation of metals such as indium onto wafer surfaces. The system is built around an 18-inch (19.5-inch nominal) stainless steel bell jar that lifts to expose the baseplate and planetary wafer fixture for loading and unloading. Note: this unit does not include a roughing pump, which is required to back the diffusion pump — a roughing pump will need to be sourced separately.
Specifications & What's Included
- Manufacturer: CHA Industries (CHA)
- Model: CHA-600 (SE-600 Series)
- System type: Vacuum thermal evaporator / thin film deposition system
- Bell jar diameter: 18" (19.5" nominal)
- Baseplate diameter: approximately 20 inches
- Feedthrough capacity: up to 15 feedthroughs for instrumentation, control, and rotary motion
- Fixturing: Planetary fixture assembly for wafer substrates
- Wafer capacity: up to 18 x 4-inch wafers (per SE-600 series configuration)
- Vacuum pump: Oil diffusion pump included (2400 l/s pumping speed per model specification)
- Roughing pump: NOT included — must be sourced separately
- Evaporation source: Indium boat/crucible assembly with gold-reflector heat shield (visible in photos)
- Control console: Analog metering, toggle and rotary controls, integrated circuit control panel
- Form factor: Floor-standing console with integrated control cabinet below and chamber column above
- Country of manufacture: United States
Applications
CHA Industries SE/SEC-600 series evaporators are used in semiconductor fabrication and research for physical vapor deposition (PVD) of thin metal films — including indium, aluminum, gold, and other materials — onto wafers, chips, and optical substrates. This class of bell jar thermal evaporation system was a workhorse of university and commercial semiconductor labs from the 1970s through the 1990s, used for contact metallization, ohmic contacts on III-V compound semiconductors (InP, GaAs), optoelectronic device fabrication, and MEMS research. The planetary fixturing rotates wafers around the evaporation source during deposition to produce uniform film thickness across the batch. These systems remain in active use in research institutions and specialty fab shops where their proven, straightforward design makes them a practical and cost-effective choice for low-to-mid volume thin film work.
This CHA Industries CHA-600 Indium Vacuum Evaporator has been pulled from a working semiconductor lab environment where it was previously in use. It has been visually inspected and photographed. The system includes the diffusion pump and planetary fixture assembly. Note: no roughing pump is included — the unit will require a roughing pump to complete the vacuum system. The interior shows oil residue and grime typical of a used diffusion-pump evaporator that has seen active service; the control panel and cabinet exterior show heavy cosmetic wear, scratching, and aging consistent with laboratory use over many years. The evaporation source area and baseplate fixtures appear intact. This system has not been powered up or tested at our facility. Please review all photos carefully and contact us with any questions before purchasing.
Warranty Information
Additional Information
Brand: |
CHA Industries |
Model: |
CHA-600 |
MPN: |
CHA-600 |
Type: |
Vacuum Thermal Evaporator / Thin Film Deposition System |
SKU: |
11841 |
Series: |
SE/SEC-600 Series |
Bell Jar Diameter: |
18" (19.5" nominal) |
Baseplate Diameter: |
20 inches (nominal) |
Vacuum Pump Type: |
Diffusion Pump (roughing pump not included) |
Diffusion Pump Pumping Speed: |
2400 l/s (model spec) |
Feedthrough Capacity: |
Up to 15 feedthroughs |
Wafer Capacity: |
18 x 4-inch wafers (planetary fixture) |
Fixturing: |
Planetary Fixture |
Deposition Material: |
Indium (configured) |
Process Type: |
Thermal Evaporation / Vacuum Deposition |
Application: |
Semiconductor wafer coating, thin film deposition |
Roughing Pump Included: |
No — not included |
Seller Notes: |
Includes diffusion pump and planetary fixture; no roughing pump |
Country/Region of Manufacture: |
United States |
Form Factor: |
Floor-Standing Console |
Condition Notes: |
CHA Industries CHA-600 Indium Vacuum Evaporator pulled from a working semiconductor lab. Includes diffusion pump and planetary fixture; no roughing pump. Heavy cosmetic wear and oil residue visible; not powered or tested at our facility. |
California Prop 65 Warning: |
WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov |
