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  • Detail of secondary model reference 660-189197R100 marking on chassis Paramount Plus 6060 top view showing water cooling ports and cable connections
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    Advanced Energy Paramount Plus 6060 VHF RF Generator 31550260-663 – Used

    Advanced Energy

    $20,000.00
    Was: $49,999.99
    Advanced Energy Paramount Plus 6060 VHF RF Generator 31550260-663 – Used The Advanced Energy Paramount Plus 6060 is an industrial-grade VHF RF (radiofrequency) power generator purpose-built for plasma-based semiconductor manufacturing, wafer processing,...
    53327
    SKU:
    53327
    Availability:
    Usually ships within 2-3 business days. Contact us for expedited shipping options.
    Weight:
    100.00 LBS
    Brand:
    Advanced Energy Industries
    Model:
    Paramount Plus 6060
    Secondary Model:
    660-189197R100
    MPN:
    31550260-663
    SKU:
    53327
    Condition:
    Used – Pulled from Working Environment
    Seller Notes:
    Includes part numbers 31550260-663 and 660-189197R100. No power supply, cables, or accessories included unless noted separately.
    Form Factor:
    Benchtop / Integrated RF Generator
    Country of Manufacture:
    United States
    Power Requirements:
    200–208V AC, Three Phase, 50–60 Hz, 40A maximum
    Cooling:
    Water-cooled (facility water connection required; disconnect before servicing)
    Max Water Pressure:
    6.9 Bar / 690 kPa
    RF Type:
    VHF (Very High Frequency) RF Power Generator
    Application:
    Plasma deposition, wafer processing, ion implantation, semiconductor manufacturing, materials processing
    Certifications:
    CE, RoHS Compliant, CSA (C/US)
    Date Code:
    08/2015
    Radiation Warning:
    Non-ionizing radiation present inside. No user-serviceable parts. Do not remove cover.
    Phase:
    Three Phase
    Voltage Rating:
    200-208V AC
    Current Rating:
    40A Max
    Frequency:
    50-60 Hz
    Condition Notes:
    This Advanced Energy Paramount Plus 6060 VHF RF generator has not been powered up or tested at our facility, but was pulled from an active semiconductor manufacturing environment where it was previously in use. The unit has been visually inspected an
    Photo Status:
    Photographed
    Frequency Band:
    VHF (Very High Frequency)
    Water Cooling Pressure Rating:
    6.9 bar
    Compatible With:
    Plasma process chambers, CVD/PECVD systems, RIE tools, RF delivery networks, impedance matching systems
    Secondary Reference:
    660-189197R100
    Product Type:
    VHF RF Power Generator
    Power Input:
    Three-phase AC
    Maximum Input Current:
    40A
    Thermal Management:
    Integrated water cooling
    Compatible Systems:
    RF delivery systems, impedance-matching networks, plasma process chambers
    $20,000.00
    Was: $49,999.99
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  • Hiden Analytical HAL IV ESP Controller – angled front-left view showing silver front panel, green power switch, Run and Fault LEDs, and black top cover with surface scratches Hiden Analytical HAL RC ESP Controller – straight-on front panel view showing Hiden Analytical logo, green illuminated power switch, Run green LED and Fault red LED indicators, and HAL IV ESP Controller label
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    Hiden Analytical HAL RC ESP HAL IV Plasma Probe Controller 100-240V 300VA

    Hiden Analytical

    $1,500.00
    Was: $2,999.99
    Hiden Analytical HAL RC ESP HAL IV Plasma Probe Controller 100-240V 300VA Rackmount controller for Hiden Analytical electrostatic plasma probe (ESP) systems. Manages probe operation and data acquisition for plasma diagnostics in semiconductor processing...
    53318
    SKU:
    53318
    Availability:
    Usually ships within 1-2 business days.
    Weight:
    20.00 LBS
    Brand:
    Hiden Analytical
    Model:
    HAL RC ESP
    Secondary Model:
    HAL IV ESP
    MPN:
    HAL RC ESP
    SKU:
    53318
    Condition:
    Used – Pulled from Working Environment
    Seller Notes:
    Controller only; no probe or accessories confirmed included. Please contact us with questions before purchasing.
    Form Factor:
    Rackmount, 2U
    Power Requirements:
    100-240V AC, 50-60Hz, 300VA Max
    Fuse Rating:
    6.3AT 250V
    Interface Type:
    RS-232, RS-485
    Connector Types:
    BNC (Probe ESP-01, Guard ESP-02, Drive ESP-11), DB9 RS-232, DB15 RS-485, DB25 AUX I/O, DB15 Trips, DB15 Limit Switch, Multi-pin Motor connector
    Application / Use Case:
    Electrostatic plasma probe (ESP) control for plasma etch, CVD, and semiconductor process diagnostics
    Indicator Lights:
    Run (green LED), Fault (red LED) on front panel
    Compatible With:
    Hiden Analytical HAL series electrostatic plasma probe systems
    Country of Manufacture:
    United Kingdom
    Condition Notes:
    This Hiden Analytical HAL RC ESP HAL IV Electrostatic Plasma Probe Controller has not been powered up or bench-tested at our facility. It was pulled from a decommissioned environment where it was previously in service. The unit shows typical cosmetic
    $1,500.00
    Was: $2,999.99
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