Thomas Swan

Thomas Swan Epison II MOCVD 1x2 Quartz Reactor Lepel T-7.5-3-KC-SW RF Heater

Thomas Swan

SKU:

47342

Availability:

This is a large capital equipment item — please contact us to arrange inspection, freight, and lead time before purchasing.

Weight:

2,000.00 LBS

Brand:

Thomas Swan Scientific Equipment

Model:

Epison II

Secondary Model:

EPITOR

MPN:

T-7.5-3-KC-SW

SKU:

47342

Condition:

Used – Pulled from R&D Lab, Appears Complete, Not Fully Tested

Seller Notes:

Includes reactor, Lepel RF heater, 2x Epison II gas monitors, Tylan 2900 MFC. No H2 purifier.

Form Factor:

Freestanding Cabinet System on Casters

Application / Use Case:

MOCVD / OMVPE epitaxial deposition, compound semiconductor R&D

Process Type:

Metal Organic Chemical Vapor Deposition (MOCVD / OMVPE)

Reactor Configuration:

1x2 vertical quartz reactor chamber

RF Heater Model:

Lepel T-7.5-3-KC-SW (water-cooled RF induction heater)

RF Heater Power Requirements:

460V, 3-Phase, 60Hz, 21A, 16.7 KVA

Thomas Swan Power Requirements:

208V, 3-Phase, 60Hz, 32A

RF Heater Type:

T-75.1-163-2 (Type per nameplate)

Gas Flow Control:

Tylan 2900 Series Mass Flow Controllers (MFC)

Gas Monitors:

Two Thomas Swan Epison II gas concentration monitors

RF Power Controller:

Control Concepts Model 3629C

Circuit Breaker:

Westinghouse Series C FDB14k, 25A, 3-Pole

Gas Valve:

Nor-Cal Products ESV-1002-NWB

Year Installed:

1995

Thomas Swan System Dimensions:

96"L x 42"D x 90"H

Lepel Unit Dimensions:

43"L x 31"D x 58"H

Temperature Control:

Integrated temperature controller (Newport Electronics 269 TF, 08 digital thermometer)

Susceptor Type:

Graphite susceptor, inductively heated

Not Included:

Johnson Matthey HP-100 Hydrogen Purifier (shown in photos but not part of sale)

Country of Manufacture:

United Kingdom

Compatible With:

III-V compound semiconductor epitaxial growth (GaAs, InP, etc.)

Condition Notes:

This Thomas Swan Epison II MOCVD 1x2 quartz reactor system with Lepel RF induction heater was recently removed from an R&D laboratory. The system appears complete but has not been fully tested.

California Prop 65 Warning:

WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov