Thomas Swan

Thomas Swan Epison II MOCVD 1x2 Quartz Reactor Lepel T-7.5-3-KC-SW RF Heater

Thomas Swan

SKU:

47342

Availability:

This is a large capital equipment item — please contact us to arrange inspection, freight, and lead time before purchasing.

Weight:

2,000.00 LBS

Brand:

Thomas Swan Scientific Equipment

Model:

Epison II

Secondary Model:

EPITOR

MPN:

T-7.5-3-KC-SW

SKU:

47342

Condition:

Used – Pulled from R&D Lab, Appears Complete, Not Fully Tested

Seller Notes:

Includes reactor, Lepel RF heater, 2x Epison II gas monitors, Tylan 2900 MFC. No H2 purifier.

Form Factor:

Freestanding Cabinet System on Casters

Application / Use Case:

MOCVD / OMVPE epitaxial deposition, compound semiconductor R&D

Process Type:

Metal Organic Chemical Vapor Deposition (MOCVD / OMVPE)

Reactor Configuration:

1x2 vertical quartz reactor chamber

RF Heater Model:

Lepel T-7.5-3-KC-SW (water-cooled RF induction heater)

RF Heater Power Requirements:

460V, 3-Phase, 60Hz, 21A, 16.7 KVA

Thomas Swan Power Requirements:

208V, 3-Phase, 60Hz, 32A

RF Heater Type:

T-75.1-163-2 (Type per nameplate)

Gas Flow Control:

Tylan 2900 Series Mass Flow Controllers (MFC)

Gas Monitors:

Two Thomas Swan Epison II gas concentration monitors

RF Power Controller:

Control Concepts Model 3629C

Circuit Breaker:

Westinghouse Series C FDB14k, 25A, 3-Pole

Gas Valve:

Nor-Cal Products ESV-1002-NWB

Year Installed:

1995

Thomas Swan System Dimensions:

96"L x 42"D x 90"H

Lepel Unit Dimensions:

43"L x 31"D x 58"H

Temperature Control:

Integrated temperature controller (Newport Electronics 269 TF, 08 digital thermometer)

Susceptor Type:

Graphite susceptor, inductively heated

Not Included:

Johnson Matthey HP-100 Hydrogen Purifier (shown in photos but not part of sale)

Country of Manufacture:

United Kingdom

Compatible With:

III-V compound semiconductor epitaxial growth (GaAs, InP, etc.)

Condition Notes:

This Thomas Swan Epison II MOCVD 1x2 quartz reactor system with Lepel RF induction heater was recently removed from an R&D laboratory. The system appears complete but has not been fully tested.