Description
Aurion B-MBT-48 Matchbox Prodik T300 30kW RF Sputtering Impedance Matching Network
RF impedance matching network designed for 30 kW sputtering and PVD deposition systems. Matches source impedance to load impedance for efficient power transfer in plasma processing applications.
Specifications & What's Included
- Model: B-MBT-48 (Matchbox Prodik T300)
- Power Rating: 30 kW
- Input Voltage: Up to 277V (3-phase)
- Control Voltage: 24V
- Interfaces: RS-232, P-Bus
- Tune Capacitor: Comet CVHI-2500AW/15-ADUB (200–2500pF)
- Load Capacitor: Comet CVBA-500BC/7-BEA-L (5–500pF)
- Water-cooled with push-fit fittings (SW3.14)
- Includes copper probe rod and mounting hardware
- Dimensions: 23" × 20" × 13"
Applications
Matchbox impedance matching networks are used in RF sputtering systems to optimize power delivery between the RF source and the sputtering chamber. This unit operates at 30 kW and is compatible with industrial PVD deposition equipment commonly used in semiconductor, coating, and thin-film manufacturing. The water-cooled design handles continuous operational loads in production environments.
This Aurion B-MBT-48 Matchbox Prodik T300 30kW RF impedance matching network has been inspected and is in good used condition. It was pulled from a working environment where it was in active use and functional operation. The aluminum enclosure shows normal wear consistent with industrial use — some light surface marks and handling scuffs are visible on the exterior panels. The internal RF matching network, including the Comet CVHI-2500AW/15-ADUB variable tune capacitor (200–2500 pF, 15/9 kV) and Comet CVBA-500BC/7-BEA-L load capacitor (5–500 pF, 7/4.2 kV), appears intact and undamaged. Water cooling fittings (SW3.14 Flow and Return), the large cathode coaxial RF output flange, and the M12 sensor connector are all present and appear intact. The unit includes the copper probe rod, push-fit water cooling adapters, and a hardware kit (M6 bolts, nuts, and couplings). Please view our photo set and contact us if you have any questions. Please note: We have multiple units in stock — yours may not be the one shown in the photos, however, it will be similar in condition and function.
Warranty Information
Additional Information
Brand: |
Aurion Anlagentechnik |
Model: |
B-MBT-48 |
MPN: |
B-MBT-48 |
Type: |
RF Impedance Matching Network (Matchbox) |
SKU: |
52215 |
Product Family: |
Matchbox Prodik T300 |
Order Number: |
301253 |
Customer Order Ref: |
61109881 |
Power Rating: |
30 kW |
Application: |
RF Sputtering / PVD Deposition |
Input Voltage (X3): |
Up to 277V |
Control Voltage (X4): |
24V |
Interface / Control: |
RS-232 (X5), P-Bus (X7) |
Cooling: |
Water-cooled (SW3.14 Flow & Return fittings) |
RF Output Connector: |
Large coaxial flange (cathode side) |
Tune Capacitor: |
Comet CVHI-2500AW/15-ADUB, 200-2500pF, 15/9kV |
Load Capacitor: |
Comet CVBA-500BC/7-BEA-L, 5-500pF, 7/4.2kV |
Country/Region of Manufacture: |
Germany |
Form Factor: |
Standalone Enclosure / Benchtop |
Dimensions: |
23" x 20" x 13" |
Seller Notes: |
Includes mounting hardware, copper probe rod, and water cooling push-fit fittings. |
Condition: |
Used – Pulled from Working Environment |
Condition Notes: |
This Aurion B-MBT-48 Matchbox Prodik T300 30kW RF impedance matching network has been inspected and is in good used condition. It was pulled from a working environment where it was in active use and functional operation. |