Description
Varian 981-4314 Vacuum Chamber Electrical Feedthrough Sputtering Gun 2.7" Flange
The Varian 981-4314 is a vacuum chamber electrical feedthrough designed for use with sputtering gun assemblies in PVD (physical vapor deposition) systems. It passes electrical connections through a vacuum-rated flange into the chamber, allowing power and signal lines to reach the sputtering gun without breaking vacuum integrity. The unit features a 2.7" OD flange and a slotted/forked tip at the inner end for mounting or positioning the gun assembly.
Specifications & What's Included
- Model: Varian 981-4314
- Flange OD: 2.7 in
- Type: Vacuum chamber electrical feedthrough — sputtering gun
- Construction: Stainless steel shaft and flange body with multiple electrical feedthrough pins passing through the flange face
- Tip: Forked/slotted wafer-holder style tip at inner (chamber-side) end
- Outer tube: Cylindrical stainless tube with heat discoloration at open end, consistent with prior sputtering use
- Includes feedthrough gun assembly only — no cables, drive hardware, or additional accessories
Applications
Electrical feedthroughs like the Varian 981-4314 are essential components in PVD sputter deposition systems used in semiconductor wafer fabrication, thin film research, and flat panel display manufacturing. They allow high-voltage or signal-level electrical connections to pass from atmosphere into the high-vacuum environment of the deposition chamber while maintaining a hermetic seal. Varian (now part of Agilent and later Vacuum Technologies) was a leading manufacturer of vacuum deposition and sputtering equipment; their feedthrough and gun components remain sought-after for maintenance and repair of legacy Varian sputter systems, as well as for custom vacuum chamber builds where a robust, vacuum-rated feedthrough is needed. This type of component is still actively used in research labs and fabs maintaining older Varian sputter tools.
This Varian 981-4314 Vacuum Chamber Electrical Feedthrough Sputtering Gun has been inspected and appears to be in good used condition. We are unable to test vacuum chamber feedthroughs at our facility. The flange and feedthrough pins look intact, and the shaft and forked tip show normal wear from prior use. The outer tube shows some heat discoloration near the open end, consistent with normal sputtering system use. Please view our photo set and contact us if you have any questions.
Warranty Information
Additional Information
Brand: |
Varian |
Model: |
981-4314 |
MPN: |
981-4314 |
SKU: |
38351 |
Type: |
Vacuum Chamber Electrical Feedthrough Sputtering Gun |
Flange OD: |
2.7 in |
Application: |
PVD Sputtering, Thin Film Deposition, Wafer Processing |
Compatible With: |
Varian Vacuum Deposition / Sputtering Systems |
Seller Notes: |
Feedthrough gun only — no additional cables or hardware included. |
Country/Region of Manufacture: |
United States |
Condition Notes: |
This Varian 981-4314 sputtering gun feedthrough has been inspected and is in good used condition. We are unable to test it at our facility. Flange and pins intact; outer tube shows heat discoloration from use. Please contact us with questions. |
California Prop 65 Warning: |
WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov |
