Ultratech Stepper 04-17-00190 16.3x58 Alignment Cell Semiconductor Stepper

Ultratech Stepper 04-17-00190 16.3x58 Alignment Cell Semiconductor Stepper

The Ultratech Stepper 04-17-00190 is a 16.3x58 Alignment Cell assembly used in Ultratech photolithography stepper systems. This listing includes the set of precision optical and mechanical subcomponent assemblies that make up the alignment cell, as shown in the photos. The assembly carries part number 04-17-00190 on the QC accept label and includes a subcomponent labeled 04-15-02994 (Rev A, manufactured April 1996, made in the USA).

Specifications & What's Included

• Manufacturer Part Number (MPN): 04-17-00190
• Description: 16.3 x 58 Alignment Cell
• Secondary P/N (subcomponent label): 04-15-02994, Rev A
• QC Test/Accept Rev: 1
• Date of Manufacture: April 1996
• Country of Manufacture: Made in the USA
• Includes: main optical housing block with two circular apertures and integrated mirror/prism element; adjustable frame/bracket subassembly with wiring harness; smaller bracket/arm subassembly with fine-adjustment hardware; two small rectangular module components
• All components are black anodized aluminum precision machined assemblies

Applications

Ultratech Stepper produced photolithography steppers widely used in semiconductor wafer fabrication from the 1970s through the 2000s. Alignment cells are critical subsystems within a stepper's optical column, responsible for detecting and correcting the precise positional alignment of the wafer and reticle before each exposure step. Accurate alignment is essential to achieving proper layer-to-layer registration in IC fabrication, directly affecting device yield and performance. Ultratech steppers were common in production fabs and university research facilities alike, particularly for MEMS, compound semiconductors, and advanced packaging applications. This assembly dates from the mid-1990s, a period when Ultratech steppers were in widespread use across the semiconductor industry. Replacement and spare alignment cell assemblies are sought by facilities still running Ultratech equipment for maintenance, repair, or optical rebuilds.