Description
RF Plasma Products LES-300 Laser Endpoint System 300 Controller 120VAC For Parts
Laser endpoint detection controller for plasma etch systems. Uses a 4mW He-Ne laser to monitor etch process endpoints in semiconductor fabrication equipment.
Specifications & What's Included
- Model: LES-300 Controller
- Power: 120VAC, 50/60 Hz, 2A (no power supply included)
- Laser: 4mW Max He-Ne
- Form Factor: Rackmount
- Rear connectors: Interface J2, Detector J3 (circular multi-pin), 2x BNC analog outputs
- Front panel controls: ON/OFF, START, LASER keyswitch, DELAY, SEARCH, ENDPT, STOP, and toggle switches for MODE, RATE, END 1, END 2, OVER-ETCH
- LED indicators: DELAY, SEARCH, ENDPT, NO ENDPT, OVER-ETCH, STOP
- Manufactured: December 1987
Applications
Endpoint detection controllers monitor plasma etch processes in semiconductor fabrication by detecting optical signals from the etch chamber. The LES-300 integrates with RF plasma etch equipment and He-Ne laser systems to determine when an etch step is complete. These controllers were standard in semiconductor manufacturing for process control and repeatability.
Condition: For Parts or Not Working
This RF Plasma Products LES-300 Laser Endpoint System 300 Controller is being sold as-is for parts or repair. The unit does not come with a power supply. It has not been tested and is not guaranteed functional. The chassis is in fair cosmetic condition with light surface wear consistent with its age; the front panel controls, toggle switches, and LED indicators appear intact and undamaged. The rear panel connectors — Interface J2, Detector J3, and the BNC analog outputs — appear present. The key for the LASER keyswitch is included. Please view our photo set and contact us if you have any questions.
This RF Plasma Products LES-300 Laser Endpoint System 300 Controller is being sold as-is for parts or repair. The unit does not come with a power supply. It has not been tested and is not guaranteed functional. The chassis is in fair cosmetic condition with light surface wear consistent with its age; the front panel controls, toggle switches, and LED indicators appear intact and undamaged. The rear panel connectors — Interface J2, Detector J3, and the BNC analog outputs — appear present. The key for the LASER keyswitch is included. Please view our photo set and contact us if you have any questions.
Warranty Information
We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information
Brand: |
RF Plasma Products, Inc. |
Model: |
LES-300 |
MPN: |
LES-300 Controller |
Type: |
Laser Endpoint Detection Controller |
SKU: |
36660 |
Condition: |
As-Is / For Parts or Not Working |
Seller Notes: |
Sold for parts or repair. No power supply included. |
Country/Region of Manufacture: |
USA |
Power Requirements: |
120VAC, 50/60 Hz, 2A |
Laser Rating: |
4mW Max He-Ne |
Form Factor: |
Rackmount |
Rear Interface Connectors: |
Interface J2 (circular multi-pin), Detector J3 (circular multi-pin) |
Analog Output: |
2x BNC analog output connectors (rear panel) |
Input/Test Ports: |
Input Test connectors on rear panel |
Fuse Rating: |
2 AMP |
Regulatory Compliance: |
21 CFR 1040.10 and 1040.11 |
Front Panel Controls: |
ON/OFF, INTENSITY display, START, LASER keyswitch, DELAY, SEARCH, ENDPT, NO ENDPT, OVER-ETCH, STOP |
Front Panel Indicators: |
LED indicators: DELAY, SEARCH, ENDPT, NO ENDPT, OVER-ETCH, STOP |
Front Panel Switches: |
Toggle switches: DELAY, RATE, END 1, END 2, OVER-ETCH, MODE |
Application: |
Plasma etch endpoint detection, semiconductor fabrication |
Manufacture Date: |
12/87 |
Compatible With: |
He-Ne laser plasma etch systems, RF plasma etch equipment |
Condition Notes: |
RF Plasma Products LES-300 Laser Endpoint System 300 Controller sold as-is for parts or repair. No power supply included. Not tested, not guaranteed functional. Fair cosmetic condition; front panel and rear connectors appear intact. Key included. |