Description
MKS Tylan FM-360 256-1000 Mass Flow Meter 1000 SCCM AIR 3/8 FNPT 500 PSIG 0-5VDC
The MKS Tylan FM-360 is a thermal mass flow transducer manufactured by Tylan Corp (now MKS Instruments) for precision measurement of gas flow in process systems. Type 256-1000, calibrated for AIR at a full-scale range of 1000 SCCM (1 SLPM), with an analog 0-5 VDC output signal proportional to flow. The stainless steel body features 3/8" FNPT inlet and outlet ports and is rated to 500 PSIG maximum pressure.
Specifications & What's Included
- Model: FM-360
- Type / MPN: 256-1000
- Gas: AIR
- Full-Scale Range: 1000 SCCM (1 SLPM)
- Output: 0-5 VDC
- Power: +15 VDC / -15 VDC
- Port Size: 3/8" FNPT (approx. 0.675" diameter)
- Max Pressure: 500 PSIG
- Pin-out: Pin 1 Case GND, Pin 2/B Common, Pin 3/C Output 0-5VDC, Pin 4 +15VDC, Pin 6/F −15VDC
- Made in USA — MKS Instruments Inc., Burlington, MA
- Includes: data plug wiring harness
Applications
Used in semiconductor fabrication processes including CVD, PVD, plasma etch, and sputtering systems where precision AIR-calibrated gas flow measurement is required.
Warranty Information
We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information
California Prop 65 Warning: |
WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov |