Description
MKS Tylan FM-360 256-1000 Mass Flow Meter 1000 SCCM AIR 3/8 FNPT 500 PSIG 0-5VDC
The MKS Tylan FM-360 is a thermal mass flow transducer manufactured by Tylan Corp (now MKS Instruments) for precision measurement of gas flow in process systems. Type 256-1000, calibrated for AIR at a full-scale range of 1000 SCCM (1 SLPM), with an analog 0-5 VDC output signal proportional to flow. The stainless steel body features 3/8" FNPT inlet and outlet ports and is rated to 500 PSIG maximum pressure.
Specifications & What's Included
- Model: FM-360
- Type / MPN: 256-1000
- Gas: AIR
- Full-Scale Range: 1000 SCCM (1 SLPM)
- Output: 0-5 VDC
- Power: +15 VDC / -15 VDC
- Port Size: 3/8" FNPT (approx. 0.675" diameter)
- Max Pressure: 500 PSIG
- Pin-out: Pin 1 Case GND, Pin 2/B Common, Pin 3/C Output 0-5VDC, Pin 4 +15VDC, Pin 6/F −15VDC
- Made in USA — MKS Instruments Inc., Burlington, MA
- Includes: data plug wiring harness
Applications
Used in semiconductor fabrication processes including CVD, PVD, plasma etch, and sputtering systems where precision AIR-calibrated gas flow measurement is required.
Warranty Information
We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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