Description
MKS Instruments 251-100 Mass Flow Control Valve 100 SCCM 1/16 FNPT Vacuum Gas
The MKS Instruments 251-100 is a compact mass flow control (MFC) valve with a 100 SCCM full-scale flow range. It features a stainless steel valve body with an integrated solenoid actuator and a red wire lead connector for electrical connection to a flow controller or control system. This type of valve is used to precisely regulate the flow of process gases in vacuum and semiconductor fabrication systems.
Specifications & What's Included
- Manufacturer: MKS Instruments Inc. (Burlington, MA, USA)
- Model / Type: 251-100
- Unit Type: Mass Flow Control Valve
- Flow Range: 100 SCCM
- Connection: 1/16" FNPT
- Body Material: Stainless steel
- Actuation: Solenoid with red wire lead connector
- Country of Manufacture: USA
- Included: Valve unit as shown in photos
Applications
MKS Instruments 251-series mass flow control valves are used in vacuum process systems where precise gas flow regulation is required. Common applications include chemical vapor deposition (CVD), physical vapor deposition (PVD), plasma etch, and other semiconductor process tools where accurate delivery of process gases such as argon, nitrogen, oxygen, or specialty gases is critical. These valves are typically paired with an MKS flow controller or readout and are a standard component in research and production gas delivery systems.
This MKS Instruments 251-100 Mass Flow Control Valve has been inspected and appears to be in good used condition. The stainless steel valve body is intact with no visible cracks or damage. The solenoid housing and red wire lead connector are present. Minor handling marks are visible on the body, consistent with prior lab use. Please view our photo set and contact us if you have any questions.
Warranty Information
Additional Information
Brand: |
MKS Instruments |
Model: |
251-100 |
MPN: |
251-100 |
Type: |
Mass Flow Control Valve |
SKU: |
20306 |
Flow Range: |
100 SCCM |
Connection Type: |
1/16" FNPT |
Body Material: |
Stainless Steel |
Application: |
Vacuum Process Gas Delivery, Semiconductor |
Country/Region of Manufacture: |
United States |
Condition: |
Used – Inspected and in Good Condition |
Seller Notes: |
Unit only, as shown in photos. Red wire lead connector present. |
Form Factor: |
Inline Valve / Compact Body |
Review Status: |
Auto-Approved (needs review) 2026-07-04 |
Condition Notes: |
MKS Instruments 251-100 Mass Flow Control Valve. Inspected and in good used condition. Stainless steel body intact, solenoid and wire lead connector present. Minor handling marks consistent with lab use. |
