MKS 195-111155 Flow Controllers 100 Series Instruction Manual 1159B 1160B

MKS 195-111155 Flow Controllers 100 Series Instruction Manual 1159B 1160B

This is the original printed Instruction Manual from MKS Instruments for the 100 Series Flow Controllers, publication number 195-111155, revision D-6/90. It covers models 1159B, 1160B, 1161B, 2159B, 2160B, and 2161B. The manual is comb-bound and in good used condition with all pages present and legible.

Specifications & What's Included

• Manufacturer: MKS Instruments
• Publication Number: 195-111155
• Revision: D-6/90
• Document Type: Instruction Manual (original printed copy)
• Product Series Covered: MKS 100 Series Flow Controllers
• Models Covered: 1159B, 1160B, 1161B, 2159B, 2160B, 2161B
• Binding: Comb-bound
• Language: English
• Format: Printed hard copy

Applications

MKS Instruments' 100 Series mass flow controllers are precision gas flow management devices used in semiconductor fabrication, thin-film deposition, chemical vapor deposition (CVD), and other process gas control applications where accurate, repeatable gas delivery is critical. The 1159B, 1160B, and 1161B models along with their 2100-series counterparts are thermal mass flow controllers designed for use with a broad range of process gases in vacuum and atmospheric process tools. This instruction manual covers installation, operation, calibration, and maintenance procedures for all six models, making it an essential reference for technicians and engineers supporting these controllers in active semiconductor or industrial process environments. MKS Instruments has been a leading supplier of flow control instrumentation since the 1960s, and the 100 Series controllers saw wide deployment in fab environments from the late 1980s through the 1990s and beyond. Original printed manuals for these controllers remain in demand by facilities still operating legacy process tools.