Description
Headway Research EC100A Photo-Resist Spinner Controller EC101 0-10000 RPM 5A
Benchtop controller for photoresist spin coating equipment used in semiconductor wafer fabrication. Operates spinners at variable speeds from 0 to 10,000 RPM with programmable spin duration up to 120 seconds.
Specifications & What's Included
- Model: EC100A / EC101
- Speed Range: 0–10,000 RPM
- Timer Range: 0–120 seconds
- Fuse Rating: 5 Amp
- Tachometer: Motomatic analog (Electro-Craft)
- Timer: Haydon analog dial
- Controls: ON/OFF toggle, speed knob, timer dial
- Rear Connections: VAC Spinner, VAC Pump, Tach Cal, Ungrounded Sig, Int/Ext Ref, J1/J3/J4
- Manufactured: April 1970, USA
- Includes: Power cable
Applications
Spin coating controllers manage photoresist application uniformity on semiconductor wafers during photolithography processes. This controller type was standard in integrated circuit fabrication facilities for coating wafer surfaces with consistent thickness through controlled rotational speed and duration.
Condition: Used
This Headway Research EC100A EC101 Photo-Resist Spinner Controller powers on and the indicator light illuminates; beyond confirming power-up, the unit has not been tested further. The tachometer meter, speed knob, timer dial, and front-panel toggle switch are all present and intact. The rear panel connections — including VAC Spinner, VAC Pump, Tach Cal, Int Ref, Ext Ref, and signal ports — are present. The steel enclosure shows surface scuffs, paint wear on the corners and sides, and general patina consistent with its vintage 1970 manufacture date. The front panel faceplate has light oxidation and age-related discoloration typical of equipment from this era. A power cable is attached and included. Please view our photo set and contact us if you have any questions.
This Headway Research EC100A EC101 Photo-Resist Spinner Controller powers on and the indicator light illuminates; beyond confirming power-up, the unit has not been tested further. The tachometer meter, speed knob, timer dial, and front-panel toggle switch are all present and intact. The rear panel connections — including VAC Spinner, VAC Pump, Tach Cal, Int Ref, Ext Ref, and signal ports — are present. The steel enclosure shows surface scuffs, paint wear on the corners and sides, and general patina consistent with its vintage 1970 manufacture date. The front panel faceplate has light oxidation and age-related discoloration typical of equipment from this era. A power cable is attached and included. Please view our photo set and contact us if you have any questions.
Warranty Information
We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information
Brand: |
Headway Research |
Model: |
EC100A |
MPN: |
EC100A CB15-7 |
Secondary Model: |
EC101 |
Type: |
Photo-Resist Spinner Controller |
SKU: |
47419 |
Speed Range: |
0-10000 RPM |
Fuse Rating: |
5 Amp |
Timer Range: |
0-120 Seconds |
Tachometer: |
Motomatic (Electro-Craft) analog tachometer |
Timer Type: |
Haydon at Torrington / General Time analog dial |
Form Factor: |
Benchtop / Portable |
Rear Connections: |
VAC Spinner, VAC Pump, Tach Cal, Ungrounded Sig, Int Ref, Ext Ref, J3, J4, J1 |
Controls: |
ON/OFF toggle, Speed knob, Timer dial (0-120 sec) |
Application: |
Photoresist spin coating, semiconductor wafer fabrication |
Manufacture Date: |
April 30, 1970 |
Serial Number Range: |
S/N 20415 (see internal fields) |
Country/Region of Manufacture: |
United States |
Condition: |
Used – Powers On |
Seller Notes: |
Includes attached power cable. Powers on and indicator light illuminates; not tested further. |
Condition Notes: |
Headway Research EC100A EC101 Photo-Resist Spinner Controller powers on and indicator light illuminates; not tested further. Shows cosmetic wear and patina consistent with vintage 1970 manufacture. Power cable included. |
