Headway Research CB15 EC101DT Photo Resist Spinner 115V 2500 RPM 12in Vacuum

Headway Research CB15 EC101DT Photo Resist Spinner 115V 2500 RPM 12in Vacuum

The Headway Research CB15 is a motor and bowl assembly designed for use with the EC101DT and PM101DT series photo resist spinner controllers. The CB15 motor/bowl configuration is built for high-inertia applications, spinning substrates up to a recommended 12-inch maximum diameter at speeds up to 2,500 RPM. This package includes all necessary accessories for immediate integration with a compatible Headway controller.

Specifications & What's Included

• Make: Headway Research, Inc.
• Model: CB15
• Full Model Number: 1-EC101DT-CB15
• Secondary Model: PWM32-BD-CB15
• Compatible Controllers: EC101DT & PM101DT Series Photo Resist Spinners
• Maximum Speed: 2,500 RPM
• Maximum Substrate Diameter: 12 inches (recommended)
• Suitable Substrate Types: Compact disc masters, thick E-beam masks, LCD panels, high-inertia chuck substrates
• Power: 115V AC, 50–60 Hz, Single Phase, 3A
• Vacuum: 23" Hg
• Configuration: Motor/Bowl (CB15) — benchtop unit
• Manufacturer: Headway Research, Inc., Garland, Texas
• Includes: Foot switch, control cable, chuck disks (2), tubing (green and clear), and instruction manual (P/N 8-19456 for EC101DT & PM101DT Series)

Applications

Headway Research photoresist spinners are standard equipment in semiconductor device fabrication, MEMS research, and photolithography labs. The CB15 motor/bowl assembly is the core component that physically spins the substrate while photoresist is applied; the controlled rotation spreads the resist into a thin, uniform film across the wafer or substrate surface — a critical step in defining circuit patterns. The CB15 configuration is specifically intended for demanding, high-inertia loads: large-format substrates like LCD panels and glass masks, thick E-beam resist stacks on 6-to-12-inch wafers, and compact disc replication masters where consistent film thickness across a wide diameter is essential. Headway Research spinners have been fixtures in university cleanrooms, national labs, and commercial semiconductor fabs since the 1970s, valued for their robust direct-drive motors and straightforward manual operation. The EC101DT and PM101DT controllers this bowl pairs with are among the most widely used manual spinner controllers in academic and R&D settings.