Description
Gasonics Scorpion DC Section 12-300000-30 Microwave Power Supply 208V 30A 60Hz
The Gasonics International / American Industrial Microwave Scorpion DC Section is a self-contained DC power supply module designed to provide the high-voltage, filament, and control power required to drive a magnetron tube in a microwave-based processing system. Manufactured in December 1997, this unit carries part number 12-300000-30 (label reference 00-700115-01) and belongs to the Scorpion platform of microwave power sources. It features a front-panel Magnetron Total On Time display (in seconds), three circuit breakers, and three status indicator lights (Stand By, System On, Microwave On), with a full suite of rear-panel I/O connectors for integration into a larger system.
Specifications & What's Included
- Manufacturer: Gasonics International / American Industrial Microwave, Danbury, CT
- Type: Scorpion DC Section Microwave Power Supply
- Part Number: 12-300000-30
- Label Reference / Secondary P/N: 00-700115-01
- Serial Number: EA0010 (internal reference)
- Date of Manufacture: December 1997
- Input Voltage: 208V AC
- Input Frequency: 60Hz
- Input Current: 30A
- Circuit Breaker CB1 — Main: 30A
- Circuit Breaker CB2 — Controller: 1A
- Circuit Breaker CB3 — Filament Fan: 2A
- Front Panel Indicators: Stand By (amber), System On (green), Microwave On (red)
- Front Panel Display: Magnetron Total On Time (seconds), digital readout
- Rear Output — Hi-Volt Out: high-voltage multi-pin connector
- Rear Output — Filament/Fan Out: multi-pin connector
- Logic/Data Lines (DL1–DL6): DL1 +5V, DL2 -15V, DL3 +5V, DL4 +15V, DL5 +12V, DL6 COMM
- Communication — COM3: RS-232 (DB9)
- Communication — COM1/COM2: RS-485 (RJ-style connector)
- Service Port P2: DB25 connector
- Waveguide Interface P1: large multi-pin connector
- AC Input: 208VAC IEC-style keyed connector (rear panel)
- Cooling: rear-mounted axial cooling fan
- Form Factor: benchtop chassis, rack-mountable with appropriate hardware
- Interior: controller PCB, transformer, wiring harness, and sub-assemblies visible and intact (top cover removed in photos)
Applications
The Scorpion DC Section is the power electronics core of a magnetron-driven microwave processing system. In semiconductor and flat-panel display fabrication, microwave power supplies of this type were used to energize magnetron sources for plasma strip, resist ash, and downstream etch processes — applications where microwave-generated plasma offered clean, efficient processing without direct RF electrode contact. Gasonics International was a well-known manufacturer of downstream microwave asher and plasma strip systems through the 1990s and 2000s, with their Aura and Scorpion platforms widely deployed in wafer fabs worldwide. The DC Section specifically converts facility AC power into the precisely regulated high-voltage DC, filament, and control voltages needed by the magnetron tube assembly, while providing system-level communications via RS-232 and RS-485 for integration with a host controller or fab automation system. This type of module is sought by facilities maintaining legacy Gasonics systems, as well as engineers and researchers building or repairing custom microwave plasma sources.
This Gasonics Scorpion DC Section Microwave Power Supply (P/N 12-300000-30) cannot be tested at our facility and is being sold strictly as-is, for parts or repair. No functionality is guaranteed. The unit is physically intact and the internal components, PCB, transformer, and wiring appear complete, as visible in our interior photos. The exterior chassis shows typical wear consistent with lab use. Please review our full photo set carefully before purchasing, and contact us with any questions.
Warranty Information
Additional Information
Brand: |
Gasonics International / American Industrial Microwave |
Model: |
Scorpion DC Section |
MPN: |
12-300000-30 |
Secondary Model: |
00-700115-01 |
SKU: |
40516 |
Type: |
Microwave DC Section Power Supply |
Condition: |
As-Is / For Parts or Not Working |
Input Voltage: |
208V AC |
Input Current: |
30A |
Input Frequency: |
60Hz |
Phase: |
Single Phase |
Manufacture Date: |
December 1997 |
Circuit Breakers: |
CB1 Main 30A, CB2 Controller 1A, CB3 Filament Fan 2A |
Outputs: |
Hi-Volt Out, Filament/Fan Out, DL1-DL6 logic lines |
DL Voltage Lines: |
DL1 5V1, DL2 -15V, DL3 5V2, DL4 +15V, DL5 +12V, DL6 COMM |
Interfaces / Ports: |
P1 Wave Guide, P2 Service Port, COM3 RS-232, COM1/COM2 RS-485 |
Front Panel Indicators: |
Stand By, System On, Microwave On indicator lights |
Magnetron Total On Time Display: |
Digital display (seconds) |
Form Factor: |
Benchtop / Rack-Mountable |
Application: |
Magnetron/microwave power for plasma etch, semiconductor processing |
Country/Region of Manufacture: |
United States |
Seller Notes: |
Sold as-is for parts or repair. Unit cannot be tested at our facility. |
Condition Notes: |
Gasonics Scorpion DC Section Microwave Power Supply 12-300000-30 sold as-is, for parts or repair. Cannot be tested at our facility. No functionality guaranteed. Review photos carefully. |
