CTI-Cryogenics 8112095G001 Purge Valve 40-80 PSI Solenoid On-Board Cryopump

CTI-Cryogenics 8112095G001 Purge Valve 40-80 PSI Solenoid On-Board Cryopump

The CTI-Cryogenics 8112095G001 is an on-board purge valve designed for use in CTI-Cryogenics cryopump systems. It is a solenoid-operated valve rated for 40–80 PSI input pressure, used to purge the cryopump during the warm-up and regeneration cycle. This is a complete replacement kit, new and unused, with all hardware and instructions included.

Specifications & What's Included

• Manufacturer: CTI-Cryogenics / Helix Technology Corporation
• Part Number: 8112095G001
• Type: On-Board Purge Valve (solenoid-operated)
• Input Pressure: 40–80 PSI
• Electrical Connector: 4-pin Molex-style connector on twisted wire harness
• Stainless steel hex port fitting on valve body
• Includes: Purge valve solenoid assembly with wire harness
• Includes: Rubber O-ring
• Includes: Black plastic cap
• Includes: Mounting clamp with screw
• Includes: 2× nylon ty-wraps
• Includes: On-Board Purge Valve Replacement Instructions, document 8040236 Rev. D (5/99)
• Compatible with CTI-Cryogenics On-Board Purge Valve Kits: 8080015K004, 8080015K017, 8080015K041, 8080015K044

Applications

CTI-Cryogenics cryopumps are used in high-vacuum and ultra-high-vacuum semiconductor processing equipment — including physical vapor deposition (PVD), chemical vapor deposition (CVD), ion implantation, and molecular beam epitaxy (MBE) systems. The purge valve plays a critical role in the cryopump regeneration cycle: during regeneration, the cryopump is warmed up to release trapped gases, and the purge valve allows a controlled flow of dry nitrogen or other purge gas through the pump to accelerate the process and purge contaminants. CTI-Cryogenics, later part of Helix Technology Corporation and subsequently acquired by Brooks Automation, was one of the dominant cryopump manufacturers for the semiconductor industry from the 1980s through the 2000s. Replacement purge valves like the 8112095G001 are routinely needed in facilities that maintain older CTI On-Board cryopump systems still in active service.