Description
CTI Cryogenics 8040444 9600 Compressor Installation Operation Maintenance Manual Rev E
This is the CTI Cryogenics 8040444 Installation, Operation, and Maintenance Instructions manual for the 9600 Compressor, Revision E (June 1997), published by CTI-Cryogenics / Helix Technology Corporation. The manual also contains document 8040382 and covers installation procedures, operational guidelines, and maintenance instructions for the CTI 9600 cryogenic compressor system.
Specifications & What's Included
- Manufacturer: CTI-Cryogenics (Helix Technology Corporation)
- Part Number: 8040444
- Secondary Part Number: 8040382 (also contained within)
- Applies To: CTI Cryogenics 9600 Compressor
- Document Type: Installation, Operation and Maintenance Instructions
- Revision: Rev. E
- Publication Date: June 1997
- Language: English
- Format: Printed pages in dark gray ring binder
Applications
CTI Cryogenics (later Helix Technology, now part of Brooks Automation) manufactured cryogenic compressors widely used in semiconductor fabrication, scientific research, and industrial vacuum systems. The 9600 is a high-capacity helium compressor designed to drive cryopumps in high-vacuum environments such as physical vapor deposition (PVD) chambers, ion implanters, and other process equipment requiring cryogenic pumping. This manual provides the procedures technicians and engineers need to safely install, operate, and maintain the 9600 compressor — making it a practical reference for facilities still running this equipment or performing legacy system service and repair.
This CTI Cryogenics 8040444 9600 Compressor Installation, Operation and Maintenance Instructions manual is in good used condition with normal shelf wear on the binder. The document is Rev. E (June 1997) and also contains part number 8040382. All pages appear to be present and legible. Please view our photo set and contact us if you have any questions.
Warranty Information
Additional Information
Brand: |
CTI-Cryogenics |
Model: |
9600 Compressor |
MPN: |
8040444 |
Secondary Model: |
8040382 |
Type: |
Installation, Operation & Maintenance Manual |
Document Type: |
Installation, Operation and Maintenance Instructions |
Revision: |
Rev. E |
Publication Date: |
June 1997 |
For Make/Model: |
CTI Cryogenics 9600 Compressor |
Publisher: |
CTI-Cryogenics / Helix Technology Corporation |
Language: |
English |
Format: |
Printed / Ring Binder |
SKU: |
28052 |
Country/Region of Manufacture: |
United States |
Condition Notes: |
CTI Cryogenics 8040444 9600 Compressor manual in good used condition. Rev. E (6/97), also contains 8040382. Pages present and legible, normal shelf wear on binder. |