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CMS

CMS PS-700 Silicon Wafer Laser Marking System Coherent Compass 501QM 4-Axis

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SKU:
36587
MPN:
PS-700
Condition:
Used
Availability:
Usually ships within 5–7 business days — contact us for freight and logistics details.
Weight:
1,920.00 LBS
Shipping:
Calculated at Checkout
  • CMS PS-700 Silicon Wafer Laser Marking System — full front view showing integrated CRT monitor, keyboard tray, and main cabinet enclosure on pallet
  • CMS PS-700 Laser Marking System — rear view of large floor-standing cabinet showing exhaust vent port on top
  • CMS PS-700 internal laser optics — green laser beam firing onto wafer stage visible in dark chamber
  • CMS PS-700 — close-up of green laser spot during operation, beam focused on wafer surface
  • CMS PS-700 control software screen showing mark data settings including mark speed 200 m/s, power 50%, frequency, and laser interlock status messages
  • CMS Control Micro Systems PS-700 front panel — brand logo, red laser viewport window, emergency stop button, and station label LS 03
  • CMS PS-700 internal optics bench — Coherent Compass laser head (teal housing), beam steering optics, mirror mounts, and rail assembly visible
  • Coherent Compass 501QM-VD-ES green laser module — label showing OEM product designation, Coherent branding, and DANGER laser warning
  • CMS PS-700 wafer motion stage — circular wafer chuck on multi-axis linear stage platform with MikroPrecision stage and cable assembly
  • CMS PS-700 motion controller cabinet — four Compumotor Zeta4 stepper motor controllers labeled X, Y, Z, T with cable harnesses
  • CMS PS-700 internal laser optical bench — full view of enclosed beam path with Coherent laser head, beam expander, mirror mounts, and rail in open lid position
  • Coherent Compass 501QM-VD rear panel — serial interface (SER.IF), LD1/LD2 status LEDs, dip-switch bank, RF OUT 1 and RF OUT 2 BNC outputs, SYNC OUT connector, model label showing 501QM-VD, serial no. 9806 1122, 90–250V 50/60Hz
  • MikroPrecision Instruments label on motion stage — model XS-1010-PMD200, serial number 707446, Newport Corporation company, Minneapolis MN USA
  • CMS PS-700 laser power supply or driver panel — multiple rotary controls labeled 2FU through 9FU, AUX connector, and cooling fan
  • CMS PS-700 front panel indicator lights — three illuminated indicators labeled EMISSION (red), SHUTTER (green), COMPLETE (blue), with CMS Control Micro Systems logo and laser danger warning label
  • CMS PS-700 internal PC tower — integrated desktop computer with CD/floppy drive bays visible inside left cabinet door
  • CMS PS-700 Newport linear stage close-up — precision ball-screw stage rail with stepper motor and Newport encoder/motor mount detail
  • CMS PS-700 wafer stage area — top-down view of X-Y motion stage with wafer chuck, laser head positioned above, and surrounding optics hardware
  • CMS PS-700 multi-axis wafer stage — side view showing stacked X-Y-Z linear stages with MikroPrecision stage label and stepper motor assembly
  • CMS PS-700 system — CRT monitor and keyboard on swing-arm mount with CMS Control Micro Systems laser cabinet door and viewport in background
  • CMS PS-700 3~6 Micron Silicon Wafer Laser Marking System - Powers ON - As Is
  • CMS PS-700 3~6 Micron Silicon Wafer Laser Marking System - Powers ON - As Is
  • CMS PS-700 3~6 Micron Silicon Wafer Laser Marking System - Powers ON - As Is
  • CMS PS-700 3~6 Micron Silicon Wafer Laser Marking System - Powers ON - As Is
  • CMS PS-700 3~6 Micron Silicon Wafer Laser Marking System - Powers ON - As Is
  • CMS PS-700 3~6 Micron Silicon Wafer Laser Marking System - Powers ON - As Is
  • CMS PS-700 3~6 Micron Silicon Wafer Laser Marking System - Powers ON - As Is
  • CMS PS-700 3~6 Micron Silicon Wafer Laser Marking System - Powers ON - As Is
  • CMS PS-700 3~6 Micron Silicon Wafer Laser Marking System - Powers ON - As Is
$4,000.00
Was: $8,000.00
Current Stock: 1

Sold Out

Description

CMS PS-700 Silicon Wafer Laser Marking System Coherent Compass 501QM 4-Axis

The CMS PS-700 is a floor-standing, PC-controlled silicon wafer laser marking system manufactured by Control Micro Systems (CMS) of Germany (GMBH Lubec, June 1999). It is designed to mark identification data directly onto silicon wafers using a pulsed green laser, with a precision 4-axis motion stage for wafer positioning. The system integrates a Coherent Compass 501QM-VD-ES diode-pumped solid-state green laser, a Compumotor AT-6400 motion controller with four Zeta4 stepper axes, Newport precision optics and motion hardware, and a dedicated PC running CMS marking software — all housed in a single large cabinet enclosure.

Specifications & What's Included

  • Manufacturer: Control Micro Systems (CMS) — Innovative Laser System Solutions
  • Model: PS-700
  • Manufacture Date: June 1999 (GMBH Lubec, Germany)
  • Wafer Size Range: 3–6 micron silicon wafers
  • Laser Source: Coherent Compass 501QM-VD-ES — diode-pumped solid-state, 532 nm green
  • Laser Power (low): 3.0W CW / pulse 1 mJ per 10 ns
  • Laser Power (high): 10.0W CW / pulse 2 mJ per 10 ns
  • Laser Power Requirements: 90–250V, 50/60 Hz (per rear label on Coherent module)
  • Lens: 03-28FT-55-532NM
  • Motion Controller: Compumotor AT-6400
  • Motor Controllers: 4x Compumotor Zeta4 stepper motor drivers (axes: X, Y, Z, T)
  • Stepper Motors: Newport stepper motors on all 4 axes
  • Wafer Stage: MikroPrecision Instruments XS-1010-PMD200 (a Newport Corporation company)
  • Mirror Mount 1: Newport P100-P Mini Platform Mirror Mount
  • Mirror Mount 2: Daedal/Parker 5510 mirror and mount
  • Mirror Mount 3: Newport MM2-1A Kinetic Mirror Mount
  • Power Meter: Newport 818-SL
  • Mark Speed: 200 m/s (per software screen)
  • Software: CMS PC-based marking control software (boots from integrated desktop PC)
  • Integrated PC: Desktop tower with CD/floppy drive visible inside cabinet
  • Display: CRT monitor on swing-arm mount with full keyboard tray
  • Front Panel: CMS branding, red laser viewport window, emergency stop button, EMISSION / SHUTTER / COMPLETE status indicator lights, station label LS 03
  • Coherent 501QM-VD rear panel: SER.IF (serial interface), LD1/LD2 status LEDs, dip-switch bank, RF OUT 1 & RF OUT 2 (BNC), SYNC OUT connector
  • Form Factor: Large floor-standing cabinet system (freight shipment required)
  • Country of Manufacture: Germany

Applications

Silicon wafer laser marking systems like the CMS PS-700 are used in semiconductor fabrication and back-end wafer processing to permanently mark individual wafers with identification codes — lot numbers, die maps, serial numbers, and alphanumeric characters — directly on the wafer surface using a focused laser pulse. Laser marking replaced earlier mechanical scribing methods because it is non-contact, leaves no debris, and can be placed in defined keep-out zones on the wafer. The 532 nm green wavelength used here is well-suited to silicon, providing controlled shallow surface ablation without damaging underlying device layers. Systems of this generation, built in the late 1990s, were commonly integrated into semiconductor fab lines handling 150 mm (6-inch) and smaller wafers — consistent with this system's stated 3–6 micron range. The 4-axis motion stage (X, Y, Z, theta) allows the wafer to be positioned, rotated, and focused precisely under the laser head. The Compumotor AT-6400 and Zeta4 controllers were a well-regarded motion control platform of the era, widely used in precision automation. This system would be of interest to buyers maintaining legacy fab lines, building a lab-scale wafer marking capability, or sourcing the high-value component subsystems (Coherent laser, Newport optics, Compumotor controllers, MikroPrecision stage) individually.

Condition: For Parts or Not Working
This CMS PS-700 Silicon Wafer Laser Marking System is being sold AS-IS for parts or repair. The system does power on and boot to the integrated PC, and the laser does fire — these are the extent of what we can confirm. Due to its age and the complexity of this type of system, we cannot confirm that it is complete or turn-key. Integration into a working fab environment would very likely require additional configuration, missing components, or customization work. It is priced and sold accordingly, with no functionality guarantee beyond what is stated above. Please view our full photo set and contact us if you have any questions before purchasing.
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Warranty Information

We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information

Brand:
Control Micro Systems (CMS)
Model:
PS-700
MPN:
PS-700
Type:
Silicon Wafer Laser Marking System
SKU:
36587
Condition:
As-Is / For Parts or Not Working
Seller Notes:
Powers on and boots to PC; laser fires. Sold AS-IS — completeness not guaranteed.
Country/Region of Manufacture:
Germany (GMBH Lubec, Mfg. 06-1999)
Manufacture Date:
June 1999
Form Factor:
Floor-Standing Cabinet System
Laser Source:
Coherent Compass 501QM-VD-ES Green Laser
Laser Wavelength:
532 nm (Green)
Laser Power (CW):
03.0W / pulse 1mJ per 10ns; 10.0W / pulse 2mJ per 10ns
Wafer Size Range:
3 to 6 Micron Silicon Wafer
Motion Controller:
Compumotor AT-6400 with 4x Compumotor Zeta4 motor controllers
Motion Axes:
4-Axis: X, Y, Z, T
Motion Stage:
Newport stepper motors; MikroPrecision XS-1010-PMD200 stage
Mirror Mount 1:
Newport P100-P Mini Platform Mirror Mount
Mirror Mount 2:
Daedal/Parker 5510 Mirror and Mount
Mirror Mount 3:
Newport MM2-1A Kinetic Mirror Mount
Power Meter:
Newport 818-SL Power Meter
Lens:
03-28FT-55-532NM
Laser Power Requirements:
90-250V, 50/60Hz (per Coherent Compass 501QM rear label)
Control Software:
PC-based marker control software (boots from integrated PC)
Application / Use Case:
Semiconductor wafer laser marking / scribing
Mark Speed:
200 m/s (per software screen)
Compatible With:
3–6 inch silicon wafers; semiconductor fab integration
Condition Notes:
CMS PS-700 Silicon Wafer Laser Marking System sold AS-IS for parts/repair. Powers on, boots to PC, laser fires — completeness not confirmed. Not guaranteed turn-key. No functionality warranty. Contact us with questions.
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