Description
CMS PS-700 Silicon Wafer Laser Marking System Coherent Compass 501QM 4-Axis
The CMS PS-700 is a floor-standing, PC-controlled silicon wafer laser marking system manufactured by Control Micro Systems (CMS) of Germany (GMBH Lubec, June 1999). It is designed to mark identification data directly onto silicon wafers using a pulsed green laser, with a precision 4-axis motion stage for wafer positioning. The system integrates a Coherent Compass 501QM-VD-ES diode-pumped solid-state green laser, a Compumotor AT-6400 motion controller with four Zeta4 stepper axes, Newport precision optics and motion hardware, and a dedicated PC running CMS marking software — all housed in a single large cabinet enclosure.
Specifications & What's Included
- Manufacturer: Control Micro Systems (CMS) — Innovative Laser System Solutions
- Model: PS-700
- Manufacture Date: June 1999 (GMBH Lubec, Germany)
- Wafer Size Range: 3–6 micron silicon wafers
- Laser Source: Coherent Compass 501QM-VD-ES — diode-pumped solid-state, 532 nm green
- Laser Power (low): 3.0W CW / pulse 1 mJ per 10 ns
- Laser Power (high): 10.0W CW / pulse 2 mJ per 10 ns
- Laser Power Requirements: 90–250V, 50/60 Hz (per rear label on Coherent module)
- Lens: 03-28FT-55-532NM
- Motion Controller: Compumotor AT-6400
- Motor Controllers: 4x Compumotor Zeta4 stepper motor drivers (axes: X, Y, Z, T)
- Stepper Motors: Newport stepper motors on all 4 axes
- Wafer Stage: MikroPrecision Instruments XS-1010-PMD200 (a Newport Corporation company)
- Mirror Mount 1: Newport P100-P Mini Platform Mirror Mount
- Mirror Mount 2: Daedal/Parker 5510 mirror and mount
- Mirror Mount 3: Newport MM2-1A Kinetic Mirror Mount
- Power Meter: Newport 818-SL
- Mark Speed: 200 m/s (per software screen)
- Software: CMS PC-based marking control software (boots from integrated desktop PC)
- Integrated PC: Desktop tower with CD/floppy drive visible inside cabinet
- Display: CRT monitor on swing-arm mount with full keyboard tray
- Front Panel: CMS branding, red laser viewport window, emergency stop button, EMISSION / SHUTTER / COMPLETE status indicator lights, station label LS 03
- Coherent 501QM-VD rear panel: SER.IF (serial interface), LD1/LD2 status LEDs, dip-switch bank, RF OUT 1 & RF OUT 2 (BNC), SYNC OUT connector
- Form Factor: Large floor-standing cabinet system (freight shipment required)
- Country of Manufacture: Germany
Applications
Silicon wafer laser marking systems like the CMS PS-700 are used in semiconductor fabrication and back-end wafer processing to permanently mark individual wafers with identification codes — lot numbers, die maps, serial numbers, and alphanumeric characters — directly on the wafer surface using a focused laser pulse. Laser marking replaced earlier mechanical scribing methods because it is non-contact, leaves no debris, and can be placed in defined keep-out zones on the wafer. The 532 nm green wavelength used here is well-suited to silicon, providing controlled shallow surface ablation without damaging underlying device layers. Systems of this generation, built in the late 1990s, were commonly integrated into semiconductor fab lines handling 150 mm (6-inch) and smaller wafers — consistent with this system's stated 3–6 micron range. The 4-axis motion stage (X, Y, Z, theta) allows the wafer to be positioned, rotated, and focused precisely under the laser head. The Compumotor AT-6400 and Zeta4 controllers were a well-regarded motion control platform of the era, widely used in precision automation. This system would be of interest to buyers maintaining legacy fab lines, building a lab-scale wafer marking capability, or sourcing the high-value component subsystems (Coherent laser, Newport optics, Compumotor controllers, MikroPrecision stage) individually.
This CMS PS-700 Silicon Wafer Laser Marking System is being sold AS-IS for parts or repair. The system does power on and boot to the integrated PC, and the laser does fire — these are the extent of what we can confirm. Due to its age and the complexity of this type of system, we cannot confirm that it is complete or turn-key. Integration into a working fab environment would very likely require additional configuration, missing components, or customization work. It is priced and sold accordingly, with no functionality guarantee beyond what is stated above. Please view our full photo set and contact us if you have any questions before purchasing.
Warranty Information
Additional Information
Brand: |
Control Micro Systems (CMS) |
Model: |
PS-700 |
MPN: |
PS-700 |
Type: |
Silicon Wafer Laser Marking System |
SKU: |
36587 |
Condition: |
As-Is / For Parts or Not Working |
Seller Notes: |
Powers on and boots to PC; laser fires. Sold AS-IS — completeness not guaranteed. |
Country/Region of Manufacture: |
Germany (GMBH Lubec, Mfg. 06-1999) |
Manufacture Date: |
June 1999 |
Form Factor: |
Floor-Standing Cabinet System |
Laser Source: |
Coherent Compass 501QM-VD-ES Green Laser |
Laser Wavelength: |
532 nm (Green) |
Laser Power (CW): |
03.0W / pulse 1mJ per 10ns; 10.0W / pulse 2mJ per 10ns |
Wafer Size Range: |
3 to 6 Micron Silicon Wafer |
Motion Controller: |
Compumotor AT-6400 with 4x Compumotor Zeta4 motor controllers |
Motion Axes: |
4-Axis: X, Y, Z, T |
Motion Stage: |
Newport stepper motors; MikroPrecision XS-1010-PMD200 stage |
Mirror Mount 1: |
Newport P100-P Mini Platform Mirror Mount |
Mirror Mount 2: |
Daedal/Parker 5510 Mirror and Mount |
Mirror Mount 3: |
Newport MM2-1A Kinetic Mirror Mount |
Power Meter: |
Newport 818-SL Power Meter |
Lens: |
03-28FT-55-532NM |
Laser Power Requirements: |
90-250V, 50/60Hz (per Coherent Compass 501QM rear label) |
Control Software: |
PC-based marker control software (boots from integrated PC) |
Application / Use Case: |
Semiconductor wafer laser marking / scribing |
Mark Speed: |
200 m/s (per software screen) |
Compatible With: |
3–6 inch silicon wafers; semiconductor fab integration |
Condition Notes: |
CMS PS-700 Silicon Wafer Laser Marking System sold AS-IS for parts/repair. Powers on, boots to PC, laser fires — completeness not confirmed. Not guaranteed turn-key. No functionality warranty. Contact us with questions. |