Description
Hitachi Metals PI-98 Pressure Insensitive Aera MFC Mass Flow Controller - PI-980 Series
- PART: 0190-34212
- BIN: multi-04
- UFS: 100 SCCM
- GAS: N2
- SEMI GAS: 13
- CN: 1000
From the manufacturer:
With industry-leading flow control technology, Aera PI-980 Series pressure insensitive MFCs (mass flow controllers) anticipate the increasing demands of next-generation semiconductor manufacturing processes, including etch, CVD, PVD, and diffusion.
This innovative technology platform provides faster response, greater gas-flow stability, higher accuracy, and superior real-time process control when compared to previous technologies. High-flow stability delivers greater chamber-to-chamber process repeatability for improved production yields.
The PI-980 MFC's design integrates traditional thermal flow architecture with a pressure and temperature sensor, and NeuralStep control technology. This creates a single, compact delivery package, eliminating the need for a number of costly gas panel components traditionally utilized. Multi-gas, multi-range functionality dramatically reduces supporting inventory requirements, further enhancing cost efficiency. In addition to integrated diagnostics, this next-generation MFC technology has been combined with our field-proven D980 series product platform design to increase system uptime and make troubleshooting quick and easy.
Condition: Used
This used item has been inspected and appears to be in good condition. It was pulled from a working environment where it was in use and functional. Please view our photo set and contact us if you have any questions.
