ASTeX AX3060 ECR Plasma Source PECVD Diamond Reactor - Large Platform

ASTeX AX3060 ECR Plasma Source PECVD Diamond Reactor - Large Platform
MTS/ASTeX AX3060 Microwave Reactor with Expanded Custom Chamber is a perfect platform for creating an integrated, customized Diamond CVD (Chemical Vapor Deposition) coating process. This microwave reactor was mounted on a large frame interfacing an enlarged working chamber by a high-end R&D facility.
Includes:

ASTeX AX3060 SmartMatch Intelligent Microwave Matching Unit

Astex SXRH Magnetron Head

CS & LS Isolator/Tuner

SmartMatch Detector Module

Astex AX3060-4 Local Interface

Astex ECR 3 uW

Astex DSM 2.5-10.5 Exit Magnet

MKS Type 124 PN 124AA-0001-AB 10 Torr +/1 15VDC Output

MSP Mills TS200-1.0

Tubing & Flow Valves for Helium ; Nitrogen Tubing, Water Hose System, Various Other Tubing & Flow Valves

Square Chamber 14 1/2 in. (W) x 10 in. (H) x 15 1/2 in. (D) Front Loading, 4 each 2 3/4 in. Flange Eye Ports, 10 in. Dish surrounded by 1/4 in. Helium tube & 2 3/4 in. center opening, Pneumatic Armature Assembly

Back Chamber 9 1/2 in. Diameter 18 1/4 in. Deep, Flange Ports & 5 in. opening at base for pump attachment

Manufacturer's Website

Large Frame/Platform & Misc Plasma Therm SLR 770 Components

Microwave & ECR Power Supply, Vacuum Pump & Computer not included.
Applications:

Base Unit for Constructing Customized Diamond CVD System

Parts Unit for MTS/ASTeX 3060 Reactor/Diamond CVD System

Base Unit for Rebuilding a Plasma Therm SLR 770 MainFrame w/ASTeX Diamond CVD System

Parts Unit for Plasma Therm SLR 770 MainFrame w/ASTeX Diamond CVD System